2023-02-23 09:36:37,135: S1F13 W System Bytes=1
<L [0]
>
.

 
2023-02-23 09:36:37,717: S1F14 System Bytes=1
<L [2]
    <B [1] [COMMACK] '' 00  >
    <L [2]
        <A [6] []  'EQPTST' >
        <A [6] []  'V1.0.0' >
    >
>
.

 
2023-02-23 09:36:38,223: S1F17 W System Bytes=2

 
2023-02-23 09:36:38,317: S1F18 System Bytes=2
<B [1] [] '' 02  >
.

 
2023-02-23 09:36:38,825: S1F3 W System Bytes=3
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-23 09:36:38,945: S1F4 System Bytes=3
<L [10]
    <A [24] [eventTimestamp]  '2023-02-23T01:36:38.017Z' >
    <U1 [1] [CommunicationState]  1 >
    <U1 [1] [ControlState]  5 >
    <U1 [1] [PreviousControlState]  3 >
    <I2 [1] [CurrentEquipmentState]  4000 >
    <I2 [1] [PreviousEquipmentState]  5000 >
    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  1 >
    <U4 [1] [SpoolCountActual]  115 >
    <U4 [1] [SpoolCountTotal]  115 >
>
.

 
2023-02-23 09:36:39,446: S6F23 W System Bytes=4
<U1 [1] [RSDC]  0 >
.

 
2023-02-23 09:36:39,564: S6F24 System Bytes=4
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:39,847: S6F11 W System Bytes=38
<L [3]
    <U4 [1] []  22 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:38:08.540Z' >
                <U4 [1] [AlarmID]  3079 >
                <A [45] [AlarmText]  'EDS: Aspiration flow PHD too low (lower head)' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:39,848: S6F12 W System Bytes=38
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:39,942: S6F11 W System Bytes=39
<L [3]
    <U4 [1] []  23 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:38:08.549Z' >
                <U4 [1] [AlarmID]  79 >
                <A [40] [AlarmText]  'Aspiration flow PHD too low (lower head)' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:39,943: S6F12 W System Bytes=39
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,022: S6F11 W System Bytes=40
<L [3]
    <U4 [1] []  24 >
    <U4 [1] []  300061 >
    <L [1]
        <L [2]
            <U4 [1] []  200061 >
            <L [3]
                <A [24] [Clock]  '2023-02-22T12:38:08.601Z' >
                <I2 [1] [CurrentEquipmentState]  5000 >
                <I2 [1] [PreviousEquipmentState]  2000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,023: S6F12 W System Bytes=40
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,176: S6F11 W System Bytes=42
<L [3]
    <U4 [1] []  25 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:38:08.871Z' >
                <U4 [1] [AlarmID]  3038 >
                <A [28] [AlarmText]  'EDS: process stopped by user' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,177: S6F12 W System Bytes=42
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,252: S6F11 W System Bytes=43
<L [3]
    <U4 [1] []  26 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:38:08.878Z' >
                <U4 [1] [AlarmID]  38 >
                <A [23] [AlarmText]  'process stopped by user' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,253: S6F12 W System Bytes=43
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,347: S6F11 W System Bytes=44
<L [3]
    <U4 [1] []  27 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T12:46:02.537Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3470200 >
                <F4 [1] [Lifetime_Component7]  422840 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,347: S6F12 W System Bytes=44
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,438: S6F11 W System Bytes=45
<L [3]
    <U4 [1] []  28 >
    <U4 [1] []  300061 >
    <L [1]
        <L [2]
            <U4 [1] []  200061 >
            <L [3]
                <A [24] [Clock]  '2023-02-22T12:54:53.939Z' >
                <I2 [1] [CurrentEquipmentState]  4000 >
                <I2 [1] [PreviousEquipmentState]  5000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,439: S6F12 W System Bytes=45
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,547: S6F11 W System Bytes=46
<L [3]
    <U4 [1] []  29 >
    <U4 [1] []  300052 >
    <L [1]
        <L [2]
            <U4 [1] []  200052 >
            <L [3]
                <A [24] [Clock]  '2023-02-22T12:55:55.520Z' >
                <A [17] [SubstrateID]  'a2302222031240702' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,548: S6F12 W System Bytes=46
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,732: S6F11 W System Bytes=48
<L [3]
    <U4 [1] []  30 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.086Z' >
                <U4 [1] [AlarmID]  2003 >
                <A [38] [AlarmText]  'SBS: Safety fault feedback STO circuit' >
                <U1 [1] [AlarmsCategory]  2 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,733: S6F12 W System Bytes=48
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,810: S6F11 W System Bytes=49
<L [3]
    <U4 [1] []  31 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.093Z' >
                <U4 [1] [AlarmID]  3 >
                <A [33] [AlarmText]  'Safety fault feedback STO circuit' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,811: S6F12 W System Bytes=49
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:40,994: S6F11 W System Bytes=51
<L [3]
    <U4 [1] []  32 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.102Z' >
                <U4 [1] [AlarmID]  2009 >
                <A [35] [AlarmText]  'SBS: Error brush 1 linear movement ' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:40,995: S6F12 W System Bytes=51
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,165: S6F11 W System Bytes=52
<L [3]
    <U4 [1] []  33 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.109Z' >
                <U4 [1] [AlarmID]  9 >
                <A [30] [AlarmText]  'Error brush linear 1 work/rest' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,166: S6F12 W System Bytes=52
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,319: S6F11 W System Bytes=54
<L [3]
    <U4 [1] []  34 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.119Z' >
                <U4 [1] [AlarmID]  2012 >
                <A [34] [AlarmText]  'SBS: Error brush 2 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,320: S6F12 W System Bytes=54
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,429: S6F11 W System Bytes=55
<L [3]
    <U4 [1] []  35 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.126Z' >
                <U4 [1] [AlarmID]  12 >
                <A [30] [AlarmText]  'Error brush linear 2 work/rest' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,430: S6F12 W System Bytes=55
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,640: S6F11 W System Bytes=57
<L [3]
    <U4 [1] []  36 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.134Z' >
                <U4 [1] [AlarmID]  2013 >
                <A [34] [AlarmText]  'SBS: Error brush 3 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,641: S6F12 W System Bytes=57
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,724: S6F11 W System Bytes=58
<L [3]
    <U4 [1] []  37 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.141Z' >
                <U4 [1] [AlarmID]  13 >
                <A [30] [AlarmText]  'Error brush linear 3 work/rest' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,725: S6F12 W System Bytes=58
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,882: S6F11 W System Bytes=60
<L [3]
    <U4 [1] []  38 >
    <U4 [1] []  12 >
    <L [1]
        <L [2]
            <U4 [1] []  12 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.148Z' >
                <U4 [1] [AlarmID]  2014 >
                <A [34] [AlarmText]  'SBS: Error brush 4 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,883: S6F12 W System Bytes=60
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:41,975: S6F11 W System Bytes=61
<L [3]
    <U4 [1] []  39 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.156Z' >
                <U4 [1] [AlarmID]  14 >
                <A [30] [AlarmText]  'Error brush linear 4 work/rest' >
                <U1 [1] [AlarmsCategory]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:36:41,977: S6F12 W System Bytes=61
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,148: S6F11 W System Bytes=63
<L [3]
    <U4 [1] []  40 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:03.164Z' >
                <U4 [1] [AlarmID]  3001 >
                <A [25] [AlarmText]  'EDS: Estop cabinet active' >
                <U1 [1] [AlarmsCategory]  2 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,149: S6F12 W System Bytes=63
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,289: S6F11 W System Bytes=65
<L [3]
    <U4 [1] []  41 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:43.572Z' >
                <U4 [1] [AlarmID]  2003 >
                <A [38] [AlarmText]  'SBS: Safety fault feedback STO circuit' >
                <U1 [1] [AlarmsCategory]  2 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,290: S6F12 W System Bytes=65
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,443: S6F11 W System Bytes=67
<L [3]
    <U4 [1] []  42 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:43.583Z' >
                <U4 [1] [AlarmID]  2009 >
                <A [35] [AlarmText]  'SBS: Error brush 1 linear movement ' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,443: S6F12 W System Bytes=67
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,632: S6F11 W System Bytes=69
<L [3]
    <U4 [1] []  43 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:43.593Z' >
                <U4 [1] [AlarmID]  2012 >
                <A [34] [AlarmText]  'SBS: Error brush 2 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,633: S6F12 W System Bytes=69
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,818: S6F11 W System Bytes=71
<L [3]
    <U4 [1] []  44 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:43.603Z' >
                <U4 [1] [AlarmID]  2013 >
                <A [34] [AlarmText]  'SBS: Error brush 3 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,819: S6F12 W System Bytes=71
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:42,974: S6F11 W System Bytes=73
<L [3]
    <U4 [1] []  45 >
    <U4 [1] []  11 >
    <L [1]
        <L [2]
            <U4 [1] []  11 >
            <L [4]
                <A [24] [Clock]  '2023-02-22T12:57:43.613Z' >
                <U4 [1] [AlarmID]  2014 >
                <A [34] [AlarmText]  'SBS: Error brush 4 linear movement' >
                <U1 [1] [AlarmsCategory]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:42,975: S6F12 W System Bytes=73
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,054: S6F11 W System Bytes=74
<L [3]
    <U4 [1] []  46 >
    <U4 [1] []  300042 >
    <L [1]
        <L [2]
            <U4 [1] []  200042 >
            <L [3]
                <A [24] [Clock]  '2023-02-22T12:57:44.727Z' >
                <A [0] [UserName]  '' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,055: S6F12 W System Bytes=74
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,146: S6F11 W System Bytes=75
<L [3]
    <U4 [1] []  47 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:06:02.543Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3470920 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,147: S6F12 W System Bytes=75
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,252: S6F11 W System Bytes=76
<L [3]
    <U4 [1] []  48 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:16:02.542Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3471520 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,253: S6F12 W System Bytes=76
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,347: S6F11 W System Bytes=77
<L [3]
    <U4 [1] []  49 >
    <U4 [1] []  300063 >
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        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:26:02.544Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3472120 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,349: S6F12 W System Bytes=77
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,425: S6F11 W System Bytes=78
<L [3]
    <U4 [1] []  50 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:36:02.546Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3472720 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
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                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,426: S6F12 W System Bytes=78
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,505: S6F11 W System Bytes=79
<L [3]
    <U4 [1] []  51 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:46:02.554Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component6]  3473320 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,506: S6F12 W System Bytes=79
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,611: S6F11 W System Bytes=80
<L [3]
    <U4 [1] []  52 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T13:56:02.556Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component6]  3473920 >
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                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,612: S6F12 W System Bytes=80
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,691: S6F11 W System Bytes=81
<L [3]
    <U4 [1] []  53 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T14:06:02.559Z' >
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                <F4 [1] [Lifetime_Component6]  3474520 >
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                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,692: S6F12 W System Bytes=81
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,783: S6F11 W System Bytes=82
<L [3]
    <U4 [1] []  54 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T14:16:02.558Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3475120 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
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                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,784: S6F12 W System Bytes=82
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,875: S6F11 W System Bytes=83
<L [3]
    <U4 [1] []  55 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T14:26:02.573Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3475720 >
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                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,876: S6F12 W System Bytes=83
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:43,967: S6F11 W System Bytes=84
<L [3]
    <U4 [1] []  56 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T14:36:02.574Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3476320 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:43,978: S6F12 W System Bytes=84
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,060: S6F11 W System Bytes=85
<L [3]
    <U4 [1] []  57 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T14:46:02.591Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3476920 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:44,061: S6F12 W System Bytes=85
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,137: S6F11 W System Bytes=86
<L [3]
    <U4 [1] []  58 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T14:56:02.622Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3477520 >
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                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:44,138: S6F12 W System Bytes=86
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,215: S6F11 W System Bytes=87
<L [3]
    <U4 [1] []  59 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T15:06:02.667Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3478120 >
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                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:44,216: S6F12 W System Bytes=87
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,291: S6F11 W System Bytes=88
<L [3]
    <U4 [1] []  60 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T15:16:02.675Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3478720 >
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                <F4 [1] [Lifetime_Component9]  11560 >
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                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:44,292: S6F12 W System Bytes=88
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,382: S6F11 W System Bytes=89
<L [3]
    <U4 [1] []  61 >
    <U4 [1] []  300063 >
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        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T15:26:02.714Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:44,384: S6F12 W System Bytes=89
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,459: S6F11 W System Bytes=90
<L [3]
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        >
    >
>
.

 
2023-02-23 09:36:44,461: S6F12 W System Bytes=90
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,536: S6F11 W System Bytes=91
<L [3]
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        >
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>
.

 
2023-02-23 09:36:44,537: S6F12 W System Bytes=91
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,615: S6F11 W System Bytes=92
<L [3]
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            >
        >
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>
.

 
2023-02-23 09:36:44,616: S6F12 W System Bytes=92
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,677: S6F11 W System Bytes=93
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:44,678: S6F12 W System Bytes=93
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,752: S6F11 W System Bytes=94
<L [3]
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>
.

 
2023-02-23 09:36:44,754: S6F12 W System Bytes=94
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,861: S6F11 W System Bytes=95
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:44,862: S6F12 W System Bytes=95
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:44,923: S6F11 W System Bytes=96
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:44,924: S6F12 W System Bytes=96
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,001: S6F11 W System Bytes=97
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:45,002: S6F12 W System Bytes=97
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,076: S6F11 W System Bytes=98
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:45,078: S6F12 W System Bytes=98
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,172: S6F11 W System Bytes=99
<L [3]
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            >
        >
    >
>
.

 
2023-02-23 09:36:45,173: S6F12 W System Bytes=99
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,264: S6F11 W System Bytes=100
<L [3]
    <U4 [1] []  72 >
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            >
        >
    >
>
.

 
2023-02-23 09:36:45,265: S6F12 W System Bytes=100
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,342: S6F11 W System Bytes=101
<L [3]
    <U4 [1] []  73 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,343: S6F12 W System Bytes=101
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,418: S6F11 W System Bytes=102
<L [3]
    <U4 [1] []  74 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,419: S6F12 W System Bytes=102
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,494: S6F11 W System Bytes=103
<L [3]
    <U4 [1] []  75 >
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                <F4 [1] [Lifetime_Component7]  423320 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,495: S6F12 W System Bytes=103
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,586: S6F11 W System Bytes=104
<L [3]
    <U4 [1] []  76 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T17:56:02.877Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3488320 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,592: S6F12 W System Bytes=104
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,665: S6F11 W System Bytes=105
<L [3]
    <U4 [1] []  77 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:06:02.882Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3488920 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,666: S6F12 W System Bytes=105
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,727: S6F11 W System Bytes=106
<L [3]
    <U4 [1] []  78 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:16:02.896Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3489520 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,728: S6F12 W System Bytes=106
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,834: S6F11 W System Bytes=107
<L [3]
    <U4 [1] []  79 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:26:02.907Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3490120 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,835: S6F12 W System Bytes=107
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:45,926: S6F11 W System Bytes=108
<L [3]
    <U4 [1] []  80 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:36:02.892Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3490720 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:45,927: S6F12 W System Bytes=108
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,004: S6F11 W System Bytes=109
<L [3]
    <U4 [1] []  81 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:46:02.899Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3491320 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
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                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,005: S6F12 W System Bytes=109
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,096: S6F11 W System Bytes=110
<L [3]
    <U4 [1] []  82 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T18:56:02.907Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3491920 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,097: S6F12 W System Bytes=110
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,175: S6F11 W System Bytes=111
<L [3]
    <U4 [1] []  83 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T19:06:02.899Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3492520 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,175: S6F12 W System Bytes=111
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,248: S6F11 W System Bytes=112
<L [3]
    <U4 [1] []  84 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T19:16:02.905Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3493120 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,249: S6F12 W System Bytes=112
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,325: S6F11 W System Bytes=113
<L [3]
    <U4 [1] []  85 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T19:26:02.915Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3493720 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,326: S6F12 W System Bytes=113
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,403: S6F11 W System Bytes=114
<L [3]
    <U4 [1] []  86 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T19:36:02.918Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3494320 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,404: S6F12 W System Bytes=114
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,479: S6F11 W System Bytes=115
<L [3]
    <U4 [1] []  87 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T19:46:02.919Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3494920 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,480: S6F12 W System Bytes=115
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,571: S6F11 W System Bytes=116
<L [3]
    <U4 [1] []  88 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T19:56:02.924Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
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                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,572: S6F12 W System Bytes=116
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,664: S6F11 W System Bytes=117
<L [3]
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    <U4 [1] []  300063 >
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                <F4 [1] [Lifetime_Component6]  3496120 >
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                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,665: S6F12 W System Bytes=117
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,756: S6F11 W System Bytes=118
<L [3]
    <U4 [1] []  90 >
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                <F4 [1] [Lifetime_Component6]  3496720 >
                <F4 [1] [Lifetime_Component7]  423320 >
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                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,757: S6F12 W System Bytes=118
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,816: S6F11 W System Bytes=119
<L [3]
    <U4 [1] []  91 >
    <U4 [1] []  300063 >
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                <A [24] [Clock]  '2023-02-22T20:26:02.929Z' >
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                <F4 [1] [Lifetime_Component6]  3497320 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,817: S6F12 W System Bytes=119
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:46,910: S6F11 W System Bytes=120
<L [3]
    <U4 [1] []  92 >
    <U4 [1] []  300063 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:46,911: S6F12 W System Bytes=120
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,001: S6F11 W System Bytes=121
<L [3]
    <U4 [1] []  93 >
    <U4 [1] []  300063 >
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                <A [24] [Clock]  '2023-02-22T20:46:02.932Z' >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,002: S6F12 W System Bytes=121
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,098: S6F11 W System Bytes=122
<L [3]
    <U4 [1] []  94 >
    <U4 [1] []  300063 >
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                <A [24] [Clock]  '2023-02-22T20:56:02.949Z' >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,099: S6F12 W System Bytes=122
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,192: S6F11 W System Bytes=123
<L [3]
    <U4 [1] []  95 >
    <U4 [1] []  300063 >
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        <L [2]
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                <A [24] [Clock]  '2023-02-22T21:06:03.019Z' >
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                <F4 [1] [SubstrateCount_Component17]  7000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,193: S6F12 W System Bytes=123
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,272: S6F11 W System Bytes=124
<L [3]
    <U4 [1] []  96 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T21:16:02.953Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3500320 >
                <F4 [1] [Lifetime_Component7]  423320 >
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                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
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                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,273: S6F12 W System Bytes=124
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,362: S6F11 W System Bytes=125
<L [3]
    <U4 [1] []  97 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T21:26:02.974Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component6]  3500920 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
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                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,363: S6F12 W System Bytes=125
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,455: S6F11 W System Bytes=126
<L [3]
    <U4 [1] []  98 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T21:36:02.961Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3501520 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,456: S6F12 W System Bytes=126
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,565: S6F11 W System Bytes=127
<L [3]
    <U4 [1] []  99 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T21:46:02.953Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3502120 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
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                <F4 [1] [SubstrateCount_Component12]  20 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,566: S6F12 W System Bytes=127
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,643: S6F11 W System Bytes=128
<L [3]
    <U4 [1] []  100 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T21:56:02.953Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3502720 >
                <F4 [1] [Lifetime_Component7]  423320 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,643: S6F12 W System Bytes=128
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,737: S6F11 W System Bytes=129
<L [3]
    <U4 [1] []  101 >
    <U4 [1] []  300063 >
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        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-22T22:06:02.965Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component6]  3503320 >
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                <F4 [1] [SubstrateCount_Component15]  5000 >
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                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,739: S6F12 W System Bytes=129
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,831: S6F11 W System Bytes=130
<L [3]
    <U4 [1] []  102 >
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        <L [2]
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                <A [24] [Clock]  '2023-02-22T22:16:02.947Z' >
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                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3503860 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,832: S6F12 W System Bytes=130
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:47,922: S6F11 W System Bytes=131
<L [3]
    <U4 [1] []  103 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T22:26:02.943Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3504460 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:47,923: S6F12 W System Bytes=131
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,002: S6F11 W System Bytes=132
<L [3]
    <U4 [1] []  104 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T22:36:02.941Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3505060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,003: S6F12 W System Bytes=132
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,094: S6F11 W System Bytes=133
<L [3]
    <U4 [1] []  105 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T22:46:02.951Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3505660 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,095: S6F12 W System Bytes=133
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,171: S6F11 W System Bytes=134
<L [3]
    <U4 [1] []  106 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T22:56:02.945Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3506260 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,175: S6F12 W System Bytes=134
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,263: S6F11 W System Bytes=135
<L [3]
    <U4 [1] []  107 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:06:02.953Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3506860 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,264: S6F12 W System Bytes=135
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,373: S6F11 W System Bytes=136
<L [3]
    <U4 [1] []  108 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:16:02.957Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3507460 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,374: S6F12 W System Bytes=136
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,464: S6F11 W System Bytes=137
<L [3]
    <U4 [1] []  109 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:26:02.962Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3508060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,465: S6F12 W System Bytes=137
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,542: S6F11 W System Bytes=138
<L [3]
    <U4 [1] []  110 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:36:02.987Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3508660 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,543: S6F12 W System Bytes=138
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,622: S6F11 W System Bytes=139
<L [3]
    <U4 [1] []  111 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:46:02.993Z' >
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                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3509260 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,623: S6F12 W System Bytes=139
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,715: S6F11 W System Bytes=140
<L [3]
    <U4 [1] []  112 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-22T23:56:03.007Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3509860 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,716: S6F12 W System Bytes=140
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,792: S6F11 W System Bytes=141
<L [3]
    <U4 [1] []  113 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T00:06:03.050Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3510460 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,793: S6F12 W System Bytes=141
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,882: S6F11 W System Bytes=142
<L [3]
    <U4 [1] []  114 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-23T00:16:03.069Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3511060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,884: S6F12 W System Bytes=142
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:48,976: S6F11 W System Bytes=143
<L [3]
    <U4 [1] []  115 >
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    <L [1]
        <L [2]
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            <L [21]
                <A [24] [Clock]  '2023-02-23T00:26:03.105Z' >
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                <F4 [1] [Lifetime_Component3]  208490 >
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                <F4 [1] [Lifetime_Component9]  11560 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
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                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:48,977: S6F12 W System Bytes=143
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,053: S6F11 W System Bytes=144
<L [3]
    <U4 [1] []  116 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T00:36:03.124Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3512260 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,054: S6F12 W System Bytes=144
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,130: S6F11 W System Bytes=145
<L [3]
    <U4 [1] []  117 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T00:46:03.151Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3512860 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,131: S6F12 W System Bytes=145
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,223: S6F11 W System Bytes=146
<L [3]
    <U4 [1] []  118 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T00:56:03.163Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3513460 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,224: S6F12 W System Bytes=146
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,315: S6F11 W System Bytes=147
<L [3]
    <U4 [1] []  119 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:06:03.201Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3514060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,316: S6F12 W System Bytes=147
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,405: S6F11 W System Bytes=148
<L [3]
    <U4 [1] []  120 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:16:03.203Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3514660 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,407: S6F12 W System Bytes=148
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,496: S6F11 W System Bytes=149
<L [3]
    <U4 [1] []  121 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:26:03.210Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3515260 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,497: S6F12 W System Bytes=149
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,572: S6F11 W System Bytes=150
<L [3]
    <U4 [1] []  122 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:36:03.253Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
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                <F4 [1] [Lifetime_Component6]  3515860 >
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                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
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                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,574: S6F12 W System Bytes=150
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,665: S6F11 W System Bytes=151
<L [3]
    <U4 [1] []  123 >
    <U4 [1] []  23 >
    <L [1]
        <L [2]
            <U4 [1] []  23 >
            <L [6]
                <A [24] []  '2023-02-23T01:36:48.762Z' >
                <U1 [1] []  0 >
                <U4 [1] []  10 >
                <U4 [1] []  10 >
                <A [24] []  '2023-02-22T12:28:13.630Z' >
                <A [24] []  '2023-02-22T12:37:31.900Z' >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,667: S6F12 W System Bytes=151
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,674: S2F43 W System Bytes=5
<L [0]
>
.

 
2023-02-23 09:36:49,846: S6F11 W System Bytes=152
<L [3]
    <U4 [1] []  124 >
    <U4 [1] []  23 >
    <L [1]
        <L [2]
            <U4 [1] []  23 >
            <L [6]
                <A [24] []  '2023-02-23T01:36:48.942Z' >
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                <U4 [1] []  10 >
                <U4 [1] []  10 >
                <A [24] []  '2023-02-22T12:28:13.630Z' >
                <A [24] []  '2023-02-22T12:37:31.900Z' >
            >
        >
    >
>
.

 
2023-02-23 09:36:49,848: S6F12 W System Bytes=152
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:36:49,946: S2F44 System Bytes=5
<L [2]
    <B [1] [] '' 00  >
    <L [0]
    >
>
.

 
2023-02-23 09:36:50,468: S2F37 W System Bytes=6
<L [2]
    <BOOLEAN [1] [CEED]  F >
    <L [0]
    >
>
.

 
2023-02-23 09:36:50,578: S2F38 System Bytes=6
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:51,107: S2F35 W System Bytes=7
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-23 09:36:51,344: S2F36 System Bytes=7
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:51,861: S2F33 W System Bytes=8
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-23 09:36:51,862: S2F33 W System Bytes=8
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-23 09:36:52,000: S2F34 System Bytes=8
<B [1] [DRACK] '' 00  >
.

 
2023-02-23 09:36:52,511: S5F3 W System Bytes=9
<L [2]
    <B [1] [ALED] '' 00  >
    <U4 [1] [ALID]  0 >
>
.

 
2023-02-23 09:36:52,633: S5F4 System Bytes=9
<B [1] [ACKC5] '' 01  >
.

 
2023-02-23 09:36:53,142: S2F33 W System Bytes=10
<L [2]
    <U4 [1] [DATAID]  0 >
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        >
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            <L [4]
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        <L [2]
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            <L [4]
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        >
        <L [2]
            <U4 [1] [reportid]  21 >
            <L [6]
                <U4 [1] [Clock]  3 >
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        <L [2]
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        <L [2]
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        <L [2]
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        <L [2]
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        <L [2]
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            <L [16]
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        <L [2]
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                <U4 [1] [LocationId_CV2]  1055 >
                <U4 [1] [Slot1_CV1]  1056 >
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                <U4 [1] [Slot1_CV2]  1060 >
                <U4 [1] [Target_A_1]  1061 >
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                <U4 [1] [Target_A_4]  1064 >
                <U4 [1] [Target_A_5]  1065 >
                <U4 [1] [Target_B_1]  1066 >
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                <U4 [1] [Target_B_3]  1068 >
                <U4 [1] [Target_B_4]  1069 >
                <U4 [1] [Target_B_5]  1070 >
                <U4 [1] [Target_C_1]  1071 >
                <U4 [1] [Target_C_2]  1072 >
                <U4 [1] [Target_C_3]  1073 >
                <U4 [1] [Target_C_4]  1074 >
                <U4 [1] [Target_C_5]  1075 >
                <U4 [1] [Target_D_1]  1076 >
                <U4 [1] [Target_D_2]  1077 >
                <U4 [1] [Target_D_3]  1078 >
                <U4 [1] [Target_D_4]  1079 >
                <U4 [1] [Target_D_5]  1080 >
                <U4 [1] [Reroute_A_1]  1081 >
                <U4 [1] [Reroute_A_2]  1082 >
                <U4 [1] [Reroute_A_3]  1083 >
                <U4 [1] [Reroute_A_4]  1084 >
                <U4 [1] [Reroute_A_5]  1085 >
                <U4 [1] [Reroute_B_1]  1086 >
                <U4 [1] [Reroute_B_2]  1087 >
                <U4 [1] [Reroute_B_3]  1088 >
                <U4 [1] [Reroute_B_4]  1089 >
                <U4 [1] [Reroute_B_5]  1090 >
                <U4 [1] [Reroute_C_1]  1091 >
                <U4 [1] [Reroute_C_2]  1092 >
                <U4 [1] [Reroute_C_3]  1093 >
                <U4 [1] [Reroute_C_4]  1094 >
                <U4 [1] [Reroute_C_5]  1095 >
                <U4 [1] [Reroute_D_1]  1096 >
                <U4 [1] [Reroute_D_2]  1097 >
                <U4 [1] [Reroute_D_3]  1098 >
                <U4 [1] [Reroute_D_4]  1099 >
                <U4 [1] [Reroute_D_5]  1100 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200041 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200042 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200052 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200055 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [RecipeChangeType]  71 >
                <U4 [1] [PPChangeName]  1011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200061 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200063 >
            <L [21]
                <U4 [1] [Clock]  3 >
                <U4 [1] [Lifetime_Component1]  1026 >
                <U4 [1] [Lifetime_Component2]  1027 >
                <U4 [1] [Lifetime_Component3]  1028 >
                <U4 [1] [Lifetime_Component4]  1029 >
                <U4 [1] [Lifetime_Component5]  1030 >
                <U4 [1] [Lifetime_Component6]  1031 >
                <U4 [1] [Lifetime_Component7]  1032 >
                <U4 [1] [Lifetime_Component8]  1033 >
                <U4 [1] [Lifetime_Component9]  1034 >
                <U4 [1] [Lifetime_Component10]  1035 >
                <U4 [1] [SubstrateCount_Component11]  1036 >
                <U4 [1] [SubstrateCount_Component12]  1037 >
                <U4 [1] [SubstrateCount_Component13]  1038 >
                <U4 [1] [SubstrateCount_Component14]  1039 >
                <U4 [1] [SubstrateCount_Component15]  1040 >
                <U4 [1] [SubstrateCount_Component16]  1041 >
                <U4 [1] [SubstrateCount_Component17]  1042 >
                <U4 [1] [SubstrateCount_Component18]  1043 >
                <U4 [1] [SubstrateCount_Component19]  1044 >
                <U4 [1] [SubstrateCount_Component20]  1045 >
            >
        >
    >
>
.

 
2023-02-23 09:36:53,144: S2F33 W System Bytes=10
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [20]
        <L [2]
            <U4 [1] [reportid]  1 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  2 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  3 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  11 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  12 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  21 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  22 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  23 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200011 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [MaterialStatus]  1001 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200012 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200013 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200021 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200022 >
            <L [16]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [ProcessResult]  1013 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
                <U4 [1] [ProcessDurationSBS]  1015 >
                <U4 [1] [ProcessDurationEDS]  1016 >
                <U4 [1] [ProcessRecipeId]  1017 >
                <U4 [1] [ProcessRecipeName]  1018 >
                <U4 [1] [ProcessRecipeVersion]  1019 >
                <U4 [1] [ProcessRecipeCreationDate]  1020 >
                <U4 [1] [ProcessRecipeLastModificationDate]  1021 >
                <U4 [1] [ProcessRecipeCreatedBy]  1022 >
                <U4 [1] [ProcessRecipeLastModifiedBy]  1023 >
                <U4 [1] [MeasuredSubstrateWidth]  1024 >
                <U4 [1] [MeasuredSubstrateLength]  1025 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200032 >
            <L [56]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID_CV1]  1046 >
                <U4 [1] [SubstrateID_SBS]  1047 >
                <U4 [1] [SubstrateID_EDS1]  1048 >
                <U4 [1] [SubstrateID_EDS2]  1049 >
                <U4 [1] [SubstrateID_CV2]  1050 >
                <U4 [1] [LocationId_CV1]  1051 >
                <U4 [1] [LocationId_SBS]  1052 >
                <U4 [1] [LocationId_EDS1]  1053 >
                <U4 [1] [LocationId_EDS2]  1054 >
                <U4 [1] [LocationId_CV2]  1055 >
                <U4 [1] [Slot1_CV1]  1056 >
                <U4 [1] [Slot1_SBS]  1057 >
                <U4 [1] [Slot1_EDS1]  1058 >
                <U4 [1] [Slot1_EDS2]  1059 >
                <U4 [1] [Slot1_CV2]  1060 >
                <U4 [1] [Target_A_1]  1061 >
                <U4 [1] [Target_A_2]  1062 >
                <U4 [1] [Target_A_3]  1063 >
                <U4 [1] [Target_A_4]  1064 >
                <U4 [1] [Target_A_5]  1065 >
                <U4 [1] [Target_B_1]  1066 >
                <U4 [1] [Target_B_2]  1067 >
                <U4 [1] [Target_B_3]  1068 >
                <U4 [1] [Target_B_4]  1069 >
                <U4 [1] [Target_B_5]  1070 >
                <U4 [1] [Target_C_1]  1071 >
                <U4 [1] [Target_C_2]  1072 >
                <U4 [1] [Target_C_3]  1073 >
                <U4 [1] [Target_C_4]  1074 >
                <U4 [1] [Target_C_5]  1075 >
                <U4 [1] [Target_D_1]  1076 >
                <U4 [1] [Target_D_2]  1077 >
                <U4 [1] [Target_D_3]  1078 >
                <U4 [1] [Target_D_4]  1079 >
                <U4 [1] [Target_D_5]  1080 >
                <U4 [1] [Reroute_A_1]  1081 >
                <U4 [1] [Reroute_A_2]  1082 >
                <U4 [1] [Reroute_A_3]  1083 >
                <U4 [1] [Reroute_A_4]  1084 >
                <U4 [1] [Reroute_A_5]  1085 >
                <U4 [1] [Reroute_B_1]  1086 >
                <U4 [1] [Reroute_B_2]  1087 >
                <U4 [1] [Reroute_B_3]  1088 >
                <U4 [1] [Reroute_B_4]  1089 >
                <U4 [1] [Reroute_B_5]  1090 >
                <U4 [1] [Reroute_C_1]  1091 >
                <U4 [1] [Reroute_C_2]  1092 >
                <U4 [1] [Reroute_C_3]  1093 >
                <U4 [1] [Reroute_C_4]  1094 >
                <U4 [1] [Reroute_C_5]  1095 >
                <U4 [1] [Reroute_D_1]  1096 >
                <U4 [1] [Reroute_D_2]  1097 >
                <U4 [1] [Reroute_D_3]  1098 >
                <U4 [1] [Reroute_D_4]  1099 >
                <U4 [1] [Reroute_D_5]  1100 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200041 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200042 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200052 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200055 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [RecipeChangeType]  71 >
                <U4 [1] [PPChangeName]  1011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200061 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200063 >
            <L [21]
                <U4 [1] [Clock]  3 >
                <U4 [1] [Lifetime_Component1]  1026 >
                <U4 [1] [Lifetime_Component2]  1027 >
                <U4 [1] [Lifetime_Component3]  1028 >
                <U4 [1] [Lifetime_Component4]  1029 >
                <U4 [1] [Lifetime_Component5]  1030 >
                <U4 [1] [Lifetime_Component6]  1031 >
                <U4 [1] [Lifetime_Component7]  1032 >
                <U4 [1] [Lifetime_Component8]  1033 >
                <U4 [1] [Lifetime_Component9]  1034 >
                <U4 [1] [Lifetime_Component10]  1035 >
                <U4 [1] [SubstrateCount_Component11]  1036 >
                <U4 [1] [SubstrateCount_Component12]  1037 >
                <U4 [1] [SubstrateCount_Component13]  1038 >
                <U4 [1] [SubstrateCount_Component14]  1039 >
                <U4 [1] [SubstrateCount_Component15]  1040 >
                <U4 [1] [SubstrateCount_Component16]  1041 >
                <U4 [1] [SubstrateCount_Component17]  1042 >
                <U4 [1] [SubstrateCount_Component18]  1043 >
                <U4 [1] [SubstrateCount_Component19]  1044 >
                <U4 [1] [SubstrateCount_Component20]  1045 >
            >
        >
    >
>
.

 
2023-02-23 09:36:53,251: S2F34 System Bytes=10
<B [1] [DRACK] '' 00  >
.

 
2023-02-23 09:36:53,766: S2F35 W System Bytes=11
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [20]
        <L [2]
            <U4 [1] [CEID]  1 >
            <L [1]
                <U4 [1] [RPTID]  1 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  2 >
            <L [1]
                <U4 [1] [RPTID]  2 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  3 >
            <L [1]
                <U4 [1] [RPTID]  3 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  11 >
            <L [1]
                <U4 [1] [RPTID]  11 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  12 >
            <L [1]
                <U4 [1] [RPTID]  12 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  21 >
            <L [1]
                <U4 [1] [RPTID]  21 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  22 >
            <L [1]
                <U4 [1] [RPTID]  22 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  23 >
            <L [1]
                <U4 [1] [RPTID]  23 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300011 >
            <L [1]
                <U4 [1] [RPTID]  200011 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300012 >
            <L [1]
                <U4 [1] [RPTID]  200012 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300013 >
            <L [1]
                <U4 [1] [RPTID]  200013 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300021 >
            <L [1]
                <U4 [1] [RPTID]  200021 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300022 >
            <L [1]
                <U4 [1] [RPTID]  200022 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300032 >
            <L [1]
                <U4 [1] [RPTID]  200032 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300041 >
            <L [1]
                <U4 [1] [RPTID]  200041 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300042 >
            <L [1]
                <U4 [1] [RPTID]  200042 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300052 >
            <L [1]
                <U4 [1] [RPTID]  200052 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300055 >
            <L [1]
                <U4 [1] [RPTID]  200055 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300061 >
            <L [1]
                <U4 [1] [RPTID]  200061 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300063 >
            <L [1]
                <U4 [1] [RPTID]  200063 >
            >
        >
    >
>
.

 
2023-02-23 09:36:53,911: S2F36 System Bytes=11
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:54,418: S2F37 W System Bytes=12
<L [2]
    <BOOLEAN [1] [CEED]  T >
    <L [20]
        <U4 [1] [EquipmentOffline]  1 >
        <U4 [1] [ControlStateLocal]  2 >
        <U4 [1] [ControlStateRemote]  3 >
        <U4 [1] [AlarmDetected]  11 >
        <U4 [1] [AlarmCleared]  12 >
        <U4 [1] [SpoolTransmitFailure]  21 >
        <U4 [1] [SpoolingActivated]  22 >
        <U4 [1] [SpoolingDeactivated]  23 >
        <U4 [1] [Material_Received]  300011 >
        <U4 [1] [Material_Removed]  300012 >
        <U4 [1] [Material_Hold]  300013 >
        <U4 [1] [Process_Start]  300021 >
        <U4 [1] [Process_Finish]  300022 >
        <U4 [1] [Slotlist]  300032 >
        <U4 [1] [UserLoggedOn]  300041 >
        <U4 [1] [UserLoggedOff]  300042 >
        <U4 [1] [ProcessRecipeSelected]  300052 >
        <U4 [1] [ProcessProgramChange]  300055 >
        <U4 [1] [EquipmentStateChange]  300061 >
        <U4 [1] [Machine_Data_1]  300063 >
    >
>
.

 
2023-02-23 09:36:54,559: S2F38 System Bytes=12
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:55,072: S5F3 W System Bytes=13
<L [2]
    <B [1] [ALED] '' 80  >
    <U4 [1] [ALID]  0 >
>
.

 
2023-02-23 09:36:55,210: S5F4 System Bytes=13
<B [1] [ACKC5] '' 01  >
.

 
2023-02-23 09:36:55,722: S2F43 W System Bytes=14
<L [2]
    <L [2]
        <U1 [1] [STRID]  5 >
        <L [1]
            <U1 [1] []  1 >
        >
    >
    <L [2]
        <U1 [1] [STRID]  6 >
        <L [1]
            <U1 [1] []  11 >
        >
    >
>
.

 
2023-02-23 09:36:55,859: S2F44 System Bytes=14
<L [2]
    <B [1] [] '' 00  >
    <L [0]
    >
>
.

 
2023-02-23 09:36:56,375: S1F3 W System Bytes=15
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-23 09:36:56,529: S1F4 System Bytes=15
<L [10]
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    <I2 [1] [CurrentEquipmentState]  4000 >
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    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  0 >
    <U4 [1] [SpoolCountActual]  0 >
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>
.

 
2023-02-23 09:36:57,038: S5F5 W System Bytes=16
<L [0]
>
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2023-02-23 09:36:57,188: S5F6 System Bytes=16
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        <A [19] [ALTX]  'SBS: Error Brush 1 ' >
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        <B [1] [ALCD] '' 05  >
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        <A [22] [ALTX]  'SBS: Estop line active' >
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    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2008 >
        <A [18] [ALTX]  'SBS: Error Brush 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 85  >
        <U4 [1] [ALID]  2009 >
        <A [35] [ALTX]  'SBS: Error brush 1 linear movement ' >
    >
    <L [3]
        <B [1] [ALCD] '' 85  >
        <U4 [1] [ALID]  2014 >
        <A [34] [ALTX]  'SBS: Error brush 4 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2015 >
        <A [25] [ALTX]  'SBS: Error dual centering' >
    >
    <L [3]
        <B [1] [ALCD] '' 85  >
        <U4 [1] [ALID]  2012 >
        <A [34] [ALTX]  'SBS: Error brush 2 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 85  >
        <U4 [1] [ALID]  2013 >
        <A [34] [ALTX]  'SBS: Error brush 3 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2086 >
        <A [25] [ALTX]  'SBS: Timeout infeed error' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1010 >
        <A [22] [ALTX]  'CV1: Estop Line active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1001 >
        <A [22] [ALTX]  'CV1: Estop Left Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1003 >
        <A [38] [ALTX]  'CV1: Safety fault feedback STO circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1002 >
        <A [23] [ALTX]  'CV1: EStop Right Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1005 >
        <A [43] [ALTX]  'CV1: Data on positon without sensor signals' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1004 >
        <A [25] [ALTX]  'CV1: Error Conveyor Drive' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1006 >
        <A [31] [ALTX]  'CV1: Glass present without data' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3072 >
        <A [32] [ALTX]  'EDS: Fuse Drives 400V supply NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3073 >
        <A [38] [ALTX]  'EDS: SQ stopped by HMI => no PLC error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3074 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 1 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3075 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 2 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3076 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 3 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3077 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 4 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3078 >
        <A [45] [ALTX]  'EDS: Aspiration flow ASP too low (upper head)' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3079 >
        <A [45] [ALTX]  'EDS: Aspiration flow PHD too low (lower head)' >
    >
>
.

 
2023-02-23 09:36:57,707: S7F19 W System Bytes=17

 
2023-02-23 09:36:57,813: S7F20 System Bytes=17
<L [8]
    <A [22] [PPID]  'ProcessRecipe_9.recipe' >
    <A [22] [PPID]  'ProcessRecipe_7.recipe' >
    <A [22] [PPID]  'ProcessRecipe_8.recipe' >
    <A [22] [PPID]  'ProcessRecipe_3.recipe' >
    <A [22] [PPID]  'ProcessRecipe_1.recipe' >
    <A [22] [PPID]  'ProcessRecipe_5.recipe' >
    <A [23] [PPID]  'ProcessRecipe_10.recipe' >
    <A [22] [PPID]  'ProcessRecipe_2.recipe' >
>
.

 
2023-02-23 09:36:58,320: S2F13 W System Bytes=0
<L [14]
    <U4 [1] [EnableAlarmReportSend]  4 >
    <U4 [1] [TimeFormat]  8 >
    <U4 [1] [MaxTerminalMsgLength]  9 >
    <U4 [1] [EstablishCommunicationsTimeout]  49 >
    <U4 [1] [DefaultCommunicationState]  12 >
    <U4 [1] [DefaultControlState]  15 >
    <U4 [1] [DefaultOnlineSubState]  16 >
    <U4 [1] [DefaultOfflineSubState]  17 >
    <U4 [1] [EnableSpooling]  40 >
    <U4 [1] [OverWriteSpool]  42 >
    <U4 [1] [MaxSpoolMessages]  43 >
    <U4 [1] [MaxSpoolTransmit]  44 >
    <U4 [1] [MDLN]  1 >
    <U4 [1] [SOFTREV]  2 >
>
.

 
2023-02-23 09:36:58,448: S2F14 System Bytes=18
<L [14]
    <BOOLEAN [1] [EnableAlarmReportSend]  T >
    <U1 [1] [TimeFormat]  2 >
    <U4 [1] [MaxTerminalMsgLength]  80 >
    <I2 [1] [EstablishCommunicationsTimeout]  30 >
    <U1 [1] [DefaultCommunicationState]  1 >
    <U1 [1] [DefaultControlState]  5 >
    <U1 [1] [DefaultOnlineSubState]  5 >
    <U1 [1] [DefaultOfflineSubState]  2 >
    <BOOLEAN [1] [EnableSpooling]  T >
    <BOOLEAN [1] [OverWriteSpool]  T >
    <U4 [1] [MaxSpoolMessages]  100000 >
    <U4 [1] [MaxSpoolTransmit]  0 >
    <A [6] [MDLN]  'EQPTST' >
    <A [6] [SOFTREV]  'V1.0.0' >
>
.

 
2023-02-23 09:36:58,978: S2F15 W System Bytes=19
<L [2]
    <L [2]
        <U4 [1] [DefaultControlState]  15 >
        <U1 [1] [ECV]  5 >
    >
    <L [2]
        <U4 [1] [DefaultOnlineSubState]  16 >
        <U1 [1] [ECV]  5 >
    >
>
.

 
2023-02-23 09:36:59,118: S2F16 System Bytes=19
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:59,630: S1F15 W System Bytes=20

 
2023-02-23 09:36:59,739: S1F16 System Bytes=20
<B [1] [] '' 00  >
.

 
2023-02-23 09:36:59,744: S6F11 W System Bytes=153
<L [3]
    <U4 [1] []  125 >
    <U4 [1] []  1 >
    <L [1]
        <L [2]
            <U4 [1] []  1 >
            <L [3]
                <A [24] [Clock]  '2023-02-23T01:36:58.802Z' >
                <U1 [1] [CurrentControlState]  3 >
                <U1 [1] [PreviousControlState]  5 >
            >
        >
    >
>
.

 
2023-02-23 09:36:59,746: S6F12 W System Bytes=153
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:37:00,244: S1F17 W System Bytes=21

 
2023-02-23 09:37:00,339: S6F11 W System Bytes=154
<L [3]
    <U4 [1] []  126 >
    <U4 [1] []  3 >
    <L [1]
        <L [2]
            <U4 [1] []  3 >
            <L [3]
                <A [24] [Clock]  '2023-02-23T01:36:59.418Z' >
                <U1 [1] [CurrentControlState]  5 >
                <U1 [1] [PreviousControlState]  3 >
            >
        >
    >
>
.

 
2023-02-23 09:37:00,357: S6F12 W System Bytes=154
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:37:00,357: S1F18 System Bytes=21
<B [1] [] '' 00  >
.

 
2023-02-23 09:37:00,863: S1F3 W System Bytes=22
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-23 09:37:00,994: S1F4 System Bytes=22
<L [10]
    <A [24] [eventTimestamp]  '2023-02-23T01:37:00.049Z' >
    <U1 [1] [CommunicationState]  1 >
    <U1 [1] [ControlState]  5 >
    <U1 [1] [PreviousControlState]  3 >
    <I2 [1] [CurrentEquipmentState]  4000 >
    <I2 [1] [PreviousEquipmentState]  5000 >
    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  0 >
    <U4 [1] [SpoolCountActual]  0 >
    <U4 [1] [SpoolCountTotal]  0 >
>
.

 
2023-02-23 09:37:01,509: S2F23 W System Bytes=23
<L [5]
    <U4 [1] [TRID]  1 >
    <A [6] [DSPER_hhmmss]  '000010' >
    <U4 [1] [TOTSMP]  0 >
    <U4 [1] [REPGSZ]  1 >
    <L [0]
    >
>
.

 
2023-02-23 09:37:01,648: S2F24 System Bytes=23
<B [1] [] '' 00  >
.

 
2023-02-23 09:37:18,274: S2F49 W System Bytes=24
<L [4]
    <U4 [1] [DATAID]  1031 >
    <A [4] [OBJSPEC]  '1031' >
    <A [16] [RCMD]  'Slotlist_Request' >
    <L [0]
    >
>
.

 
2023-02-23 09:37:18,540: S6F11 W System Bytes=156
<L [3]
    <U4 [1] []  127 >
    <U4 [1] []  300032 >
    <L [1]
        <L [2]
            <U4 [1] []  200032 >
            <L [56]
                <A [24] [Clock]  '2023-02-23T01:37:17.590Z' >
                <A [0] [SubstrateID_CV1]  '' >
                <A [0] [SubstrateID_SBS]  '' >
                <A [0] [SubstrateID_EDS1]  '' >
                <A [0] [SubstrateID_EDS2]  '' >
                <A [0] [SubstrateID_CV2]  '' >
                <A [3] [LocationId_CV1]  'CV1' >
                <A [3] [LocationId_SBS]  'SBS' >
                <A [4] [LocationId_EDS1]  'EDS1' >
                <A [4] [LocationId_EDS2]  'EDS2' >
                <A [3] [LocationId_CV2]  'CV2' >
                <U1 [1] [Slot1_CV1]  1 >
                <U1 [1] [Slot1_SBS]  1 >
                <U1 [1] [Slot1_EDS1]  1 >
                <U1 [1] [Slot1_EDS2]  1 >
                <U1 [1] [Slot1_CV2]  1 >
                <U1 [1] [Target_A_1]  0 >
                <U1 [1] [Target_A_2]  0 >
                <U1 [1] [Target_A_3]  0 >
                <U1 [1] [Target_A_4]  0 >
                <U1 [1] [Target_A_5]  0 >
                <U1 [1] [Target_B_1]  0 >
                <U1 [1] [Target_B_2]  0 >
                <U1 [1] [Target_B_3]  0 >
                <U1 [1] [Target_B_4]  0 >
                <U1 [1] [Target_B_5]  0 >
                <U1 [1] [Target_C_1]  0 >
                <U1 [1] [Target_C_2]  0 >
                <U1 [1] [Target_C_3]  0 >
                <U1 [1] [Target_C_4]  0 >
                <U1 [1] [Target_C_5]  0 >
                <U1 [1] [Target_D_1]  0 >
                <U1 [1] [Target_D_2]  0 >
                <U1 [1] [Target_D_3]  0 >
                <U1 [1] [Target_D_4]  0 >
                <U1 [1] [Target_D_5]  0 >
                <U1 [1] [Reroute_A_1]  0 >
                <U1 [1] [Reroute_A_2]  0 >
                <U1 [1] [Reroute_A_3]  0 >
                <U1 [1] [Reroute_A_4]  0 >
                <U1 [1] [Reroute_A_5]  0 >
                <U1 [1] [Reroute_B_1]  0 >
                <U1 [1] [Reroute_B_2]  0 >
                <U1 [1] [Reroute_B_3]  0 >
                <U1 [1] [Reroute_B_4]  0 >
                <U1 [1] [Reroute_B_5]  0 >
                <U1 [1] [Reroute_C_1]  0 >
                <U1 [1] [Reroute_C_2]  0 >
                <U1 [1] [Reroute_C_3]  0 >
                <U1 [1] [Reroute_C_4]  0 >
                <U1 [1] [Reroute_C_5]  0 >
                <U1 [1] [Reroute_D_1]  0 >
                <U1 [1] [Reroute_D_2]  0 >
                <U1 [1] [Reroute_D_3]  0 >
                <U1 [1] [Reroute_D_4]  0 >
                <U1 [1] [Reroute_D_5]  0 >
            >
        >
    >
>
.

 
2023-02-23 09:37:18,544: S6F12 W System Bytes=156
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:37:18,598: S2F50 System Bytes=24
<L [2]
    <B [1] [] '' 00  >
    <L [0]
    >
>
.

 
2023-02-23 09:46:04,153: S6F11 W System Bytes=174
<L [3]
    <U4 [1] []  128 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:46:03.263Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3516460 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:46:04,156: S6F12 W System Bytes=174
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 09:56:04,146: S6F11 W System Bytes=194
<L [3]
    <U4 [1] []  129 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T01:56:03.252Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3517060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 09:56:04,148: S6F12 W System Bytes=194
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:06:04,178: S6F11 W System Bytes=214
<L [3]
    <U4 [1] []  130 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T02:06:03.283Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3517660 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 10:06:04,180: S6F12 W System Bytes=214
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:16:04,216: S6F11 W System Bytes=235
<L [3]
    <U4 [1] []  131 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T02:16:03.279Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3518260 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 10:16:04,218: S6F12 W System Bytes=235
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:26:04,172: S6F11 W System Bytes=255
<L [3]
    <U4 [1] []  132 >
    <U4 [1] []  300063 >
    <L [1]
        <L [2]
            <U4 [1] []  200063 >
            <L [21]
                <A [24] [Clock]  '2023-02-23T02:26:03.293Z' >
                <F4 [1] [Lifetime_Component1]  199680 >
                <F4 [1] [Lifetime_Component2]  25490 >
                <F4 [1] [Lifetime_Component3]  208490 >
                <F4 [1] [Lifetime_Component4]  194550 >
                <F4 [1] [Lifetime_Component5]  27340 >
                <F4 [1] [Lifetime_Component6]  3518860 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
                <F4 [1] [Lifetime_Component9]  11560 >
                <F4 [1] [Lifetime_Component10]  11550 >
                <F4 [1] [SubstrateCount_Component11]  336 >
                <F4 [1] [SubstrateCount_Component12]  20 >
                <F4 [1] [SubstrateCount_Component13]  30 >
                <F4 [1] [SubstrateCount_Component14]  40000 >
                <F4 [1] [SubstrateCount_Component15]  5000 >
                <F4 [1] [SubstrateCount_Component16]  6000 >
                <F4 [1] [SubstrateCount_Component17]  7000 >
                <F4 [1] [SubstrateCount_Component18]  8000 >
                <F4 [1] [SubstrateCount_Component19]  0 >
                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 10:26:04,173: S6F12 W System Bytes=255
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:36:04,174: S6F11 W System Bytes=275
<L [3]
    <U4 [1] []  133 >
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                <F4 [1] [Lifetime_Component8]  11560 >
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                <F4 [1] [SubstrateCount_Component16]  6000 >
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                <F4 [1] [SubstrateCount_Component18]  8000 >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 10:36:04,177: S6F12 W System Bytes=275
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:46:04,194: S6F11 W System Bytes=296
<L [3]
    <U4 [1] []  134 >
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                <F4 [1] [Lifetime_Component6]  3520060 >
                <F4 [1] [Lifetime_Component7]  423320 >
                <F4 [1] [Lifetime_Component8]  11560 >
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                <F4 [1] [SubstrateCount_Component11]  336 >
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            >
        >
    >
>
.

 
2023-02-23 10:46:04,197: S6F12 W System Bytes=296
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 10:56:04,178: S6F11 W System Bytes=316
<L [3]
    <U4 [1] []  135 >
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                <A [24] [Clock]  '2023-02-23T02:56:03.311Z' >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 10:56:04,178: S6F12 W System Bytes=316
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 11:06:04,185: S6F11 W System Bytes=336
<L [3]
    <U4 [1] []  136 >
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                <A [24] [Clock]  '2023-02-23T03:06:03.326Z' >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 11:06:04,186: S6F12 W System Bytes=336
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 11:16:04,177: S6F11 W System Bytes=356
<L [3]
    <U4 [1] []  137 >
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                <A [24] [Clock]  '2023-02-23T03:16:03.327Z' >
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                <F4 [1] [SubstrateCount_Component20]  10000 >
            >
        >
    >
>
.

 
2023-02-23 11:16:04,179: S6F12 W System Bytes=356
<B [1] [ACKC6] '' 00  >
.

 
2023-02-23 11:26:04,182: S6F11 W System Bytes=377
<L [3]
    <U4 [1] []  138 >
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            >
        >
    >
>
.

 
2023-02-23 11:26:04,182: S6F12 W System Bytes=377
<B [1] [ACKC6] '' 00  >
.