2023-02-15 18:35:31,250: S1F13 W System Bytes=1
<L [0]
>
.

 
2023-02-15 18:35:31,730: S1F14 System Bytes=1
<L [2]
    <B [1] [COMMACK] '' 00  >
    <L [2]
        <A [6] []  'EQPTST' >
        <A [6] []  'V1.0.0' >
    >
>
.

 
2023-02-15 18:35:32,242: S1F17 W System Bytes=2

 
2023-02-15 18:35:32,317: S1F18 System Bytes=2
<B [1] [] '' 02  >
.

 
2023-02-15 18:35:32,830: S1F3 W System Bytes=3
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-15 18:35:32,938: S1F4 System Bytes=3
<L [10]
    <A [24] [eventTimestamp]  '2023-02-15T10:31:49.140Z' >
    <U1 [1] [CommunicationState]  1 >
    <U1 [1] [ControlState]  4 >
    <U1 [1] [PreviousControlState]  5 >
    <I2 [1] [CurrentEquipmentState]  2000 >
    <I2 [1] [PreviousEquipmentState]  1000 >
    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  1 >
    <U4 [1] [SpoolCountActual]  23 >
    <U4 [1] [SpoolCountTotal]  23 >
>
.

 
2023-02-15 18:35:33,443: S6F23 W System Bytes=4
<U1 [1] [RSDC]  0 >
.

 
2023-02-15 18:35:33,524: S6F24 System Bytes=4
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:33,871: S6F11 W System Bytes=124
<L [3]
    <U4 [1] []  817 >
    <U4 [1] []  300042 >
    <L [1]
        <L [2]
            <U4 [1] []  200042 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:22:24.041Z' >
                <A [0] [UserName]  '' >
                <A [0] [PreviousUserName]  '' >
            >
        >
    >
>
.

 
2023-02-15 18:35:33,872: S6F12 W System Bytes=124
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:33,935: S6F11 W System Bytes=125
<L [3]
    <U4 [1] []  818 >
    <U4 [1] []  300042 >
    <L [1]
        <L [2]
            <U4 [1] []  200042 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:22:52.580Z' >
                <A [0] [UserName]  '' >
                <A [0] [PreviousUserName]  '' >
            >
        >
    >
>
.

 
2023-02-15 18:35:33,936: S6F12 W System Bytes=125
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,062: S6F11 W System Bytes=127
<L [3]
    <U4 [1] []  820 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:22:59.264Z' >
                <A [4] [UserName]  '4Jet' >
                <A [0] [PreviousUserName]  '' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,063: S6F12 W System Bytes=127
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,112: S6F11 W System Bytes=128
<L [3]
    <U4 [1] []  821 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:23:09.597Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,113: S6F12 W System Bytes=128
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,222: S6F11 W System Bytes=130
<L [3]
    <U4 [1] []  823 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:23:15.402Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,223: S6F12 W System Bytes=130
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,416: S6F11 W System Bytes=133
<L [3]
    <U4 [1] []  826 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:24:27.988Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,417: S6F12 W System Bytes=133
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,553: S6F11 W System Bytes=135
<L [3]
    <U4 [1] []  828 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:24:33.367Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,554: S6F12 W System Bytes=135
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,756: S6F11 W System Bytes=138
<L [3]
    <U4 [1] []  831 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:25:35.314Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,758: S6F12 W System Bytes=138
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:34,888: S6F11 W System Bytes=140
<L [3]
    <U4 [1] []  833 >
    <U4 [1] []  300041 >
    <L [1]
        <L [2]
            <U4 [1] []  200041 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:25:40.348Z' >
                <A [4] [UserName]  '4Jet' >
                <A [4] [PreviousUserName]  '4Jet' >
            >
        >
    >
>
.

 
2023-02-15 18:35:34,890: S6F12 W System Bytes=140
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:35,022: S6F11 W System Bytes=142
<L [3]
    <U4 [1] []  835 >
    <U4 [1] []  2 >
    <L [1]
        <L [2]
            <U4 [1] []  2 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:31:47.589Z' >
                <U1 [1] [CurrentControlState]  4 >
                <U1 [1] [PreviousControlState]  5 >
            >
        >
    >
>
.

 
2023-02-15 18:35:35,023: S6F12 W System Bytes=142
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:35,081: S6F11 W System Bytes=143
<L [3]
    <U4 [1] []  836 >
    <U4 [1] []  23 >
    <L [1]
        <L [2]
            <U4 [1] []  23 >
            <L [6]
                <A [24] []  '2023-02-15T10:31:51.334Z' >
                <U1 [1] []  0 >
                <U4 [1] []  9 >
                <U4 [1] []  9 >
                <A [24] []  '2023-02-15T10:14:02.760Z' >
                <A [24] []  '2023-02-15T10:20:21.787Z' >
            >
        >
    >
>
.

 
2023-02-15 18:35:35,083: S6F12 W System Bytes=143
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:35,103: S2F43 W System Bytes=5
<L [0]
>
.

 
2023-02-15 18:35:35,212: S6F11 W System Bytes=144
<L [3]
    <U4 [1] []  837 >
    <U4 [1] []  23 >
    <L [1]
        <L [2]
            <U4 [1] []  23 >
            <L [6]
                <A [24] []  '2023-02-15T10:31:51.465Z' >
                <U1 [1] []  0 >
                <U4 [1] []  9 >
                <U4 [1] []  9 >
                <A [24] []  '2023-02-15T10:14:02.760Z' >
                <A [24] []  '2023-02-15T10:20:21.787Z' >
            >
        >
    >
>
.

 
2023-02-15 18:35:35,212: S6F12 W System Bytes=144
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:35,288: S2F44 System Bytes=5
<L [2]
    <B [1] [] '' 00  >
    <L [0]
    >
>
.

 
2023-02-15 18:35:35,797: S2F37 W System Bytes=6
<L [2]
    <BOOLEAN [1] [CEED]  F >
    <L [0]
    >
>
.

 
2023-02-15 18:35:35,896: S2F38 System Bytes=6
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:36,452: S2F35 W System Bytes=7
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-15 18:35:36,535: S2F36 System Bytes=7
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:37,058: S2F33 W System Bytes=8
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-15 18:35:37,058: S2F33 W System Bytes=8
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [0]
    >
>
.

 
2023-02-15 18:35:37,135: S2F34 System Bytes=8
<B [1] [DRACK] '' 00  >
.

 
2023-02-15 18:35:37,653: S5F3 W System Bytes=9
<L [2]
    <B [1] [ALED] '' 00  >
    <U4 [1] [ALID]  0 >
>
.

 
2023-02-15 18:35:37,743: S5F4 System Bytes=9
<B [1] [ACKC5] '' 01  >
.

 
2023-02-15 18:35:38,253: S2F33 W System Bytes=10
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [20]
        <L [2]
            <U4 [1] [reportid]  1 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  2 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  3 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  11 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  12 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  21 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  22 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  23 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200011 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [MaterialStatus]  1001 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200012 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200013 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200021 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200022 >
            <L [16]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [ProcessResult]  1013 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
                <U4 [1] [ProcessDurationSBS]  1015 >
                <U4 [1] [ProcessDurationEDS]  1016 >
                <U4 [1] [ProcessRecipeId]  1017 >
                <U4 [1] [ProcessRecipeName]  1018 >
                <U4 [1] [ProcessRecipeVersion]  1019 >
                <U4 [1] [ProcessRecipeCreationDate]  1020 >
                <U4 [1] [ProcessRecipeLastModificationDate]  1021 >
                <U4 [1] [ProcessRecipeCreatedBy]  1022 >
                <U4 [1] [ProcessRecipeLastModifiedBy]  1023 >
                <U4 [1] [MeasuredSubstrateWidth]  1024 >
                <U4 [1] [MeasuredSubstrateLength]  1025 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200032 >
            <L [56]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID_CV1]  1046 >
                <U4 [1] [SubstrateID_SBS]  1047 >
                <U4 [1] [SubstrateID_EDS1]  1048 >
                <U4 [1] [SubstrateID_EDS2]  1049 >
                <U4 [1] [SubstrateID_CV2]  1050 >
                <U4 [1] [LocationId_CV1]  1051 >
                <U4 [1] [LocationId_SBS]  1052 >
                <U4 [1] [LocationId_EDS1]  1053 >
                <U4 [1] [LocationId_EDS2]  1054 >
                <U4 [1] [LocationId_CV2]  1055 >
                <U4 [1] [Slot1_CV1]  1056 >
                <U4 [1] [Slot1_SBS]  1057 >
                <U4 [1] [Slot1_EDS1]  1058 >
                <U4 [1] [Slot1_EDS2]  1059 >
                <U4 [1] [Slot1_CV2]  1060 >
                <U4 [1] [Target_A_1]  1061 >
                <U4 [1] [Target_A_2]  1062 >
                <U4 [1] [Target_A_3]  1063 >
                <U4 [1] [Target_A_4]  1064 >
                <U4 [1] [Target_A_5]  1065 >
                <U4 [1] [Target_B_1]  1066 >
                <U4 [1] [Target_B_2]  1067 >
                <U4 [1] [Target_B_3]  1068 >
                <U4 [1] [Target_B_4]  1069 >
                <U4 [1] [Target_B_5]  1070 >
                <U4 [1] [Target_C_1]  1071 >
                <U4 [1] [Target_C_2]  1072 >
                <U4 [1] [Target_C_3]  1073 >
                <U4 [1] [Target_C_4]  1074 >
                <U4 [1] [Target_C_5]  1075 >
                <U4 [1] [Target_D_1]  1076 >
                <U4 [1] [Target_D_2]  1077 >
                <U4 [1] [Target_D_3]  1078 >
                <U4 [1] [Target_D_4]  1079 >
                <U4 [1] [Target_D_5]  1080 >
                <U4 [1] [Reroute_A_1]  1081 >
                <U4 [1] [Reroute_A_2]  1082 >
                <U4 [1] [Reroute_A_3]  1083 >
                <U4 [1] [Reroute_A_4]  1084 >
                <U4 [1] [Reroute_A_5]  1085 >
                <U4 [1] [Reroute_B_1]  1086 >
                <U4 [1] [Reroute_B_2]  1087 >
                <U4 [1] [Reroute_B_3]  1088 >
                <U4 [1] [Reroute_B_4]  1089 >
                <U4 [1] [Reroute_B_5]  1090 >
                <U4 [1] [Reroute_C_1]  1091 >
                <U4 [1] [Reroute_C_2]  1092 >
                <U4 [1] [Reroute_C_3]  1093 >
                <U4 [1] [Reroute_C_4]  1094 >
                <U4 [1] [Reroute_C_5]  1095 >
                <U4 [1] [Reroute_D_1]  1096 >
                <U4 [1] [Reroute_D_2]  1097 >
                <U4 [1] [Reroute_D_3]  1098 >
                <U4 [1] [Reroute_D_4]  1099 >
                <U4 [1] [Reroute_D_5]  1100 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200041 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200042 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200052 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200055 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [RecipeChangeType]  71 >
                <U4 [1] [PPChangeName]  1011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200061 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200063 >
            <L [1]
                <U4 [1] [Clock]  3 >
            >
        >
    >
>
.

 
2023-02-15 18:35:38,255: S2F33 W System Bytes=10
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [20]
        <L [2]
            <U4 [1] [reportid]  1 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  2 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  3 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentControlState]  13 >
                <U4 [1] [PreviousControlState]  14 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  11 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  12 >
            <L [4]
                <U4 [1] [Clock]  3 >
                <U4 [1] [AlarmID]  5 >
                <U4 [1] [AlarmText]  6 >
                <U4 [1] [AlarmsCategory]  7 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  21 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  22 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  23 >
            <L [6]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SpoolingState]  41 >
                <U4 [1] [SpoolCountActual]  45 >
                <U4 [1] [SpoolCountTotal]  46 >
                <U4 [1] [SpoolFullTime]  47 >
                <U4 [1] [SpoolStartTime]  48 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200011 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [MaterialStatus]  1001 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200012 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200013 >
            <L [12]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [LocationID]  1010 >
                <U4 [1] [MaterialStatus]  1001 >
                <U4 [1] [Target A]  1002 >
                <U4 [1] [Target B]  1003 >
                <U4 [1] [Target C]  1004 >
                <U4 [1] [Target D]  1005 >
                <U4 [1] [Reroute A]  1006 >
                <U4 [1] [Reroute B]  1007 >
                <U4 [1] [Reroute C]  1008 >
                <U4 [1] [Reroute D]  1009 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200021 >
            <L [5]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200022 >
            <L [16]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [ProcessResult]  1013 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
                <U4 [1] [ProcessDurationSBS]  1015 >
                <U4 [1] [ProcessDurationEDS]  1016 >
                <U4 [1] [ProcessRecipeId]  1017 >
                <U4 [1] [ProcessRecipeName]  1018 >
                <U4 [1] [ProcessRecipeVersion]  1019 >
                <U4 [1] [ProcessRecipeCreationDate]  1020 >
                <U4 [1] [ProcessRecipeLastModificationDate]  1021 >
                <U4 [1] [ProcessRecipeCreatedBy]  1022 >
                <U4 [1] [ProcessRecipeLastModifiedBy]  1023 >
                <U4 [1] [MeasuredSubstrateWidth]  1024 >
                <U4 [1] [MeasuredSubstrateLength]  1025 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200032 >
            <L [56]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID_CV1]  1046 >
                <U4 [1] [SubstrateID_SBS]  1047 >
                <U4 [1] [SubstrateID_EDS1]  1048 >
                <U4 [1] [SubstrateID_EDS2]  1049 >
                <U4 [1] [SubstrateID_CV2]  1050 >
                <U4 [1] [LocationId_CV1]  1051 >
                <U4 [1] [LocationId_SBS]  1052 >
                <U4 [1] [LocationId_EDS1]  1053 >
                <U4 [1] [LocationId_EDS2]  1054 >
                <U4 [1] [LocationId_CV2]  1055 >
                <U4 [1] [Slot1_CV1]  1056 >
                <U4 [1] [Slot1_SBS]  1057 >
                <U4 [1] [Slot1_EDS1]  1058 >
                <U4 [1] [Slot1_EDS2]  1059 >
                <U4 [1] [Slot1_CV2]  1060 >
                <U4 [1] [Target_A_1]  1061 >
                <U4 [1] [Target_A_2]  1062 >
                <U4 [1] [Target_A_3]  1063 >
                <U4 [1] [Target_A_4]  1064 >
                <U4 [1] [Target_A_5]  1065 >
                <U4 [1] [Target_B_1]  1066 >
                <U4 [1] [Target_B_2]  1067 >
                <U4 [1] [Target_B_3]  1068 >
                <U4 [1] [Target_B_4]  1069 >
                <U4 [1] [Target_B_5]  1070 >
                <U4 [1] [Target_C_1]  1071 >
                <U4 [1] [Target_C_2]  1072 >
                <U4 [1] [Target_C_3]  1073 >
                <U4 [1] [Target_C_4]  1074 >
                <U4 [1] [Target_C_5]  1075 >
                <U4 [1] [Target_D_1]  1076 >
                <U4 [1] [Target_D_2]  1077 >
                <U4 [1] [Target_D_3]  1078 >
                <U4 [1] [Target_D_4]  1079 >
                <U4 [1] [Target_D_5]  1080 >
                <U4 [1] [Reroute_A_1]  1081 >
                <U4 [1] [Reroute_A_2]  1082 >
                <U4 [1] [Reroute_A_3]  1083 >
                <U4 [1] [Reroute_A_4]  1084 >
                <U4 [1] [Reroute_A_5]  1085 >
                <U4 [1] [Reroute_B_1]  1086 >
                <U4 [1] [Reroute_B_2]  1087 >
                <U4 [1] [Reroute_B_3]  1088 >
                <U4 [1] [Reroute_B_4]  1089 >
                <U4 [1] [Reroute_B_5]  1090 >
                <U4 [1] [Reroute_C_1]  1091 >
                <U4 [1] [Reroute_C_2]  1092 >
                <U4 [1] [Reroute_C_3]  1093 >
                <U4 [1] [Reroute_C_4]  1094 >
                <U4 [1] [Reroute_C_5]  1095 >
                <U4 [1] [Reroute_D_1]  1096 >
                <U4 [1] [Reroute_D_2]  1097 >
                <U4 [1] [Reroute_D_3]  1098 >
                <U4 [1] [Reroute_D_4]  1099 >
                <U4 [1] [Reroute_D_5]  1100 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200041 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200042 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [UserName]  21012 >
                <U4 [1] [PreviousUserName]  21013 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200052 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [SubstrateID]  1000 >
                <U4 [1] [PPExecName]  72 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200055 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [RecipeChangeType]  71 >
                <U4 [1] [PPChangeName]  1011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200061 >
            <L [3]
                <U4 [1] [Clock]  3 >
                <U4 [1] [CurrentEquipmentState]  21010 >
                <U4 [1] [PreviousEquipmentState]  21011 >
            >
        >
        <L [2]
            <U4 [1] [reportid]  200063 >
            <L [1]
                <U4 [1] [Clock]  3 >
            >
        >
    >
>
.

 
2023-02-15 18:35:38,323: S2F34 System Bytes=10
<B [1] [DRACK] '' 00  >
.

 
2023-02-15 18:35:38,837: S2F35 W System Bytes=11
<L [2]
    <U4 [1] [DATAID]  0 >
    <L [20]
        <L [2]
            <U4 [1] [CEID]  1 >
            <L [1]
                <U4 [1] [RPTID]  1 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  2 >
            <L [1]
                <U4 [1] [RPTID]  2 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  3 >
            <L [1]
                <U4 [1] [RPTID]  3 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  11 >
            <L [1]
                <U4 [1] [RPTID]  11 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  12 >
            <L [1]
                <U4 [1] [RPTID]  12 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  21 >
            <L [1]
                <U4 [1] [RPTID]  21 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  22 >
            <L [1]
                <U4 [1] [RPTID]  22 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  23 >
            <L [1]
                <U4 [1] [RPTID]  23 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300011 >
            <L [1]
                <U4 [1] [RPTID]  200011 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300012 >
            <L [1]
                <U4 [1] [RPTID]  200012 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300013 >
            <L [1]
                <U4 [1] [RPTID]  200013 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300021 >
            <L [1]
                <U4 [1] [RPTID]  200021 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300022 >
            <L [1]
                <U4 [1] [RPTID]  200022 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300032 >
            <L [1]
                <U4 [1] [RPTID]  200032 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300041 >
            <L [1]
                <U4 [1] [RPTID]  200041 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300042 >
            <L [1]
                <U4 [1] [RPTID]  200042 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300052 >
            <L [1]
                <U4 [1] [RPTID]  200052 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300055 >
            <L [1]
                <U4 [1] [RPTID]  200055 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300061 >
            <L [1]
                <U4 [1] [RPTID]  200061 >
            >
        >
        <L [2]
            <U4 [1] [CEID]  300063 >
            <L [1]
                <U4 [1] [RPTID]  200063 >
            >
        >
    >
>
.

 
2023-02-15 18:35:38,920: S2F36 System Bytes=11
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:39,428: S2F37 W System Bytes=12
<L [2]
    <BOOLEAN [1] [CEED]  T >
    <L [20]
        <U4 [1] [EquipmentOffline]  1 >
        <U4 [1] [ControlStateLocal]  2 >
        <U4 [1] [ControlStateRemote]  3 >
        <U4 [1] [AlarmDetected]  11 >
        <U4 [1] [AlarmCleared]  12 >
        <U4 [1] [SpoolTransmitFailure]  21 >
        <U4 [1] [SpoolingActivated]  22 >
        <U4 [1] [SpoolingDeactivated]  23 >
        <U4 [1] [Material_Received]  300011 >
        <U4 [1] [Material_Removed]  300012 >
        <U4 [1] [Material_Hold]  300013 >
        <U4 [1] [Process_Start]  300021 >
        <U4 [1] [Process_Finish]  300022 >
        <U4 [1] [Slotlist]  300032 >
        <U4 [1] [UserLoggedOn]  300041 >
        <U4 [1] [UserLoggedOff]  300042 >
        <U4 [1] [ProcessRecipeSelected]  300052 >
        <U4 [1] [ProcessProgramChange]  300055 >
        <U4 [1] [EquipmentStateChange]  300061 >
        <U4 [1] [Machine_Data_1]  300063 >
    >
>
.

 
2023-02-15 18:35:39,517: S2F38 System Bytes=12
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:40,030: S5F3 W System Bytes=13
<L [2]
    <B [1] [ALED] '' 80  >
    <U4 [1] [ALID]  0 >
>
.

 
2023-02-15 18:35:40,107: S5F4 System Bytes=13
<B [1] [ACKC5] '' 01  >
.

 
2023-02-15 18:35:40,628: S2F43 W System Bytes=14
<L [2]
    <L [2]
        <U1 [1] [STRID]  5 >
        <L [1]
            <U1 [1] []  1 >
        >
    >
    <L [2]
        <U1 [1] [STRID]  6 >
        <L [1]
            <U1 [1] []  11 >
        >
    >
>
.

 
2023-02-15 18:35:40,706: S2F44 System Bytes=14
<L [2]
    <B [1] [] '' 00  >
    <L [0]
    >
>
.

 
2023-02-15 18:35:41,217: S1F3 W System Bytes=15
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-15 18:35:41,306: S1F4 System Bytes=15
<L [10]
    <A [24] [eventTimestamp]  '2023-02-15T10:31:57.529Z' >
    <U1 [1] [CommunicationState]  1 >
    <U1 [1] [ControlState]  4 >
    <U1 [1] [PreviousControlState]  5 >
    <I2 [1] [CurrentEquipmentState]  2000 >
    <I2 [1] [PreviousEquipmentState]  1000 >
    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  0 >
    <U4 [1] [SpoolCountActual]  0 >
    <U4 [1] [SpoolCountTotal]  0 >
>
.

 
2023-02-15 18:35:41,817: S5F5 W System Bytes=16
<L [0]
>
.

 
2023-02-15 18:35:41,907: S5F6 System Bytes=16
<L [135]
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4065 >
        <A [31] [ALTX]  'CV2: Downstream life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4067 >
        <A [29] [ALTX]  'CV2: Interface Upstream error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4066 >
        <A [29] [ALTX]  'CV2: Upstream Life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4069 >
        <A [40] [ALTX]  'CV2: Gap sensor not free. Transfer error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4068 >
        <A [30] [ALTX]  'CV2: Interface downstream erro' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4070 >
        <A [20] [ALTX]  'CV2: HMI-PLC timeout' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4073 >
        <A [21] [ALTX]  'CV2: Sequence stopped' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3004 >
        <A [36] [ALTX]  'EDS: Estop left infeed inside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3005 >
        <A [38] [ALTX]  'EDS: Estop right infeed outside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3006 >
        <A [39] [ALTX]  'EDS: Estop right outfeed outside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3007 >
        <A [40] [ALTX]  'EDS: Estop right infeed inside activexxx' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3001 >
        <A [25] [ALTX]  'EDS: Estop cabinet active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3002 >
        <A [37] [ALTX]  'EDS: Estop left infeed outside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4086 >
        <A [25] [ALTX]  'CV2: Timeout infeed error' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3003 >
        <A [38] [ALTX]  'EDS: Estop left outfeed outside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3049 >
        <A [38] [ALTX]  'EDS: Safety fault feedback STO circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4005 >
        <A [43] [ALTX]  'CV2: Data on positon without sensor signals' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3048 >
        <A [40] [ALTX]  'EDS: Safety fault feedback Estop circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4004 >
        <A [25] [ALTX]  'CV2: Error Conveyor Drive' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3051 >
        <A [22] [ALTX]  'EDS: Error door left 1' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3050 >
        <A [40] [ALTX]  'EDS: Safety fault feedback laser circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  4006 >
        <A [31] [ALTX]  'CV2: Glass present without data' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3053 >
        <A [22] [ALTX]  'EDS: Error door left 3' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  4001 >
        <A [22] [ALTX]  'CV2: Estop Left Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3052 >
        <A [22] [ALTX]  'EDS: Error door left 2' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3055 >
        <A [23] [ALTX]  'EDS: Error door right 1' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  4003 >
        <A [38] [ALTX]  'CV2: Safety fault feedback STO circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3054 >
        <A [22] [ALTX]  'EDS: Error door left 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  4002 >
        <A [23] [ALTX]  'CV2: EStop Right Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3041 >
        <A [18] [ALTX]  'EDS: Error chiller' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3040 >
        <A [28] [ALTX]  'EDS: time out vacuum outfeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3043 >
        <A [26] [ALTX]  'EDS: Error aspiration unit' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3042 >
        <A [23] [ALTX]  'EDS: Error Flap outfeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3045 >
        <A [29] [ALTX]  'EDS: Error drive align infeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3044 >
        <A [22] [ALTX]  'EDS: Error flap infeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3047 >
        <A [32] [ALTX]  'EDS: Error drive conveyor infeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3046 >
        <A [30] [ALTX]  'EDS: Error drive align outfeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  4010 >
        <A [22] [ALTX]  'CV2: Estop Line active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3064 >
        <A [60] [ALTX]  'EDS: laser commisiioning active // automatik mode prohibited' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3065 >
        <A [42] [ALTX]  'EDS: Interface downstream life signal lost' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3066 >
        <A [40] [ALTX]  'EDS: Interface upstream life signal lost' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3067 >
        <A [31] [ALTX]  'EDS: Interface downstream error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3068 >
        <A [29] [ALTX]  'EDS: Interface upstream error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3069 >
        <A [41] [ALTX]  'EDS: gap sensor not free / transfer error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3070 >
        <A [20] [ALTX]  'EDS: HMI-PLC Timeout' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3071 >
        <A [33] [ALTX]  'EDS: Aligning axis not referenced' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3056 >
        <A [23] [ALTX]  'EDS: Error door right 2' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3057 >
        <A [23] [ALTX]  'EDS: Error door right 3' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3058 >
        <A [23] [ALTX]  'EDS: Error door right 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3062 >
        <A [33] [ALTX]  'EDS: Error drive conveyor outfeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3063 >
        <A [50] [ALTX]  'EDS: Gripper free with data / glass not in gripper' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3019 >
        <A [23] [ALTX]  'EDS: time out gripper 2' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1066 >
        <A [29] [ALTX]  'CV1: Upstream Life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3018 >
        <A [23] [ALTX]  'EDS: time out gripper 1' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1067 >
        <A [29] [ALTX]  'CV1: Interface Upstream error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3017 >
        <A [31] [ALTX]  'EDS: time out gripper Aligning2' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3016 >
        <A [31] [ALTX]  'EDS: time out gripper Aligning1' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1065 >
        <A [31] [ALTX]  'CV1: Downstream life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3023 >
        <A [30] [ALTX]  'EDS: time out gripper linear 1' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1070 >
        <A [20] [ALTX]  'CV1: HMI-PLC timeout' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3022 >
        <A [23] [ALTX]  'EDS: time out gripper 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3021 >
        <A [23] [ALTX]  'EDS: time out gripper 3' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1068 >
        <A [30] [ALTX]  'CV1: Interface downstream erro' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3020 >
        <A [21] [ALTX]  'EDS: Fuse chiller NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1069 >
        <A [40] [ALTX]  'CV1: Gap sensor not free. Transfer error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3011 >
        <A [16] [ALTX]  'EDS: Laser error' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3010 >
        <A [31] [ALTX]  'EDS: Estop extern active active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3009 >
        <A [41] [ALTX]  'EDS: Estop right outfeed inside activeyyy' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  3008 >
        <A [37] [ALTX]  'EDS: Estop left outfeed inside active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3015 >
        <A [29] [ALTX]  'EDS: Fuse cabinet cooling NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 06  >
        <U4 [1] [ALID]  3501 >
        <A [42] [ALTX]  'EDS: Automatic power measurement requested' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3014 >
        <A [31] [ALTX]  'EDS: Overvoltage protection NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3013 >
        <A [33] [ALTX]  'EDS: Communication with Laser NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3012 >
        <A [34] [ALTX]  'EDS: Fuse Power supply Laser 1 NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3034 >
        <A [37] [ALTX]  'EDS: time out conveyor lifting infeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3035 >
        <A [38] [ALTX]  'EDS: time out conveyor lifting outfeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 06  >
        <U4 [1] [ALID]  3505 >
        <A [52] [ALTX]  'EDS: Laser simulation mode active. No laser emission' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3032 >
        <A [28] [ALTX]  'EDS: Fuse 24V peripheral NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 06  >
        <U4 [1] [ALID]  3506 >
        <A [53] [ALTX]  'EDS: Aspiration settings too low. Beware of pollution' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3033 >
        <A [23] [ALTX]  'EDS: Fuse 24V drive NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3038 >
        <A [28] [ALTX]  'EDS: process stopped by user' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3039 >
        <A [27] [ALTX]  'EDS: time out vacuum infeed' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1086 >
        <A [25] [ALTX]  'CV1: Timeout infeed error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3036 >
        <A [30] [ALTX]  'EDS: time out gripper ref glas' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3037 >
        <A [36] [ALTX]  'EDS: error air pressure out of range' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3026 >
        <A [30] [ALTX]  'EDS: time out gripper linear 3' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3027 >
        <A [34] [ALTX]  'EDS: Fuse 24V Operator buttons NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3024 >
        <A [30] [ALTX]  'EDS: air conditioning CA fault' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1073 >
        <A [21] [ALTX]  'CV1: Sequence stopped' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3025 >
        <A [30] [ALTX]  'EDS: time out gripper linear 2' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3030 >
        <A [30] [ALTX]  'EDS: time out gripper linear 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3031 >
        <A [31] [ALTX]  'EDS: Fuse 24V miscellaneous NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3028 >
        <A [24] [ALTX]  'EDS: Fuse supply Asi NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3029 >
        <A [21] [ALTX]  'EDS: Fuse 24V IPC NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2065 >
        <A [31] [ALTX]  'SBS: Downstream life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2067 >
        <A [29] [ALTX]  'SBS: Interface Upstream error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2066 >
        <A [29] [ALTX]  'SBS: Upstream Life signal NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2069 >
        <A [40] [ALTX]  'SBS: Gap sensor not free. Transfer error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2068 >
        <A [30] [ALTX]  'SBS: Interface downstream erro' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2070 >
        <A [20] [ALTX]  'SBS: HMI-PLC timeout' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2073 >
        <A [21] [ALTX]  'SBS: Sequence stopped' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2017 >
        <A [19] [ALTX]  'SBS: Error lift low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2016 >
        <A [27] [ALTX]  'SBS: Error single centering' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2019 >
        <A [17] [ALTX]  'SBS: Error vacuum' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2018 >
        <A [18] [ALTX]  'SBS: Error lift up' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  2002 >
        <A [23] [ALTX]  'SBS: Estop right active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  2003 >
        <A [38] [ALTX]  'SBS: Safety fault feedback STO circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  2001 >
        <A [22] [ALTX]  'SBS: Estop Left active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2006 >
        <A [18] [ALTX]  'SBS: Error Brush 2' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2007 >
        <A [18] [ALTX]  'SBS: Error Brush 3' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2004 >
        <A [25] [ALTX]  'SBS: Error conveyor drive' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2005 >
        <A [19] [ALTX]  'SBS: Error Brush 1 ' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2010 >
        <A [22] [ALTX]  'SBS: Estop line active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2008 >
        <A [18] [ALTX]  'SBS: Error Brush 4' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2009 >
        <A [35] [ALTX]  'SBS: Error brush 1 linear movement ' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2014 >
        <A [34] [ALTX]  'SBS: Error brush 4 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2015 >
        <A [25] [ALTX]  'SBS: Error dual centering' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2012 >
        <A [34] [ALTX]  'SBS: Error brush 2 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2013 >
        <A [34] [ALTX]  'SBS: Error brush 3 linear movement' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  2086 >
        <A [25] [ALTX]  'SBS: Timeout infeed error' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1010 >
        <A [22] [ALTX]  'CV1: Estop Line active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1001 >
        <A [22] [ALTX]  'CV1: Estop Left Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1003 >
        <A [38] [ALTX]  'CV1: Safety fault feedback STO circuit' >
    >
    <L [3]
        <B [1] [ALCD] '' 02  >
        <U4 [1] [ALID]  1002 >
        <A [23] [ALTX]  'CV1: EStop Right Active' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1005 >
        <A [43] [ALTX]  'CV1: Data on positon without sensor signals' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1004 >
        <A [25] [ALTX]  'CV1: Error Conveyor Drive' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  1006 >
        <A [31] [ALTX]  'CV1: Glass present without data' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3072 >
        <A [32] [ALTX]  'EDS: Fuse Drives 400V supply NOK' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3073 >
        <A [38] [ALTX]  'EDS: SQ stopped by HMI => no PLC error' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3074 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 1 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3075 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 2 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3076 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 3 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3077 >
        <A [40] [ALTX]  'EDS: Cooling water flow circuit 4 to low' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3078 >
        <A [45] [ALTX]  'EDS: Aspiration flow ASP too low (upper head)' >
    >
    <L [3]
        <B [1] [ALCD] '' 05  >
        <U4 [1] [ALID]  3079 >
        <A [45] [ALTX]  'EDS: Aspiration flow PHD too low (lower head)' >
    >
>
.

 
2023-02-15 18:35:42,430: S7F19 W System Bytes=17

 
2023-02-15 18:35:42,509: S7F20 System Bytes=17
<L [8]
    <A [22] [PPID]  'ProcessRecipe_9.recipe' >
    <A [22] [PPID]  'ProcessRecipe_7.recipe' >
    <A [22] [PPID]  'ProcessRecipe_8.recipe' >
    <A [22] [PPID]  'ProcessRecipe_3.recipe' >
    <A [22] [PPID]  'ProcessRecipe_1.recipe' >
    <A [22] [PPID]  'ProcessRecipe_5.recipe' >
    <A [23] [PPID]  'ProcessRecipe_10.recipe' >
    <A [22] [PPID]  'ProcessRecipe_2.recipe' >
>
.

 
2023-02-15 18:35:43,016: S2F13 W System Bytes=0
<L [14]
    <U4 [1] [EnableAlarmReportSend]  4 >
    <U4 [1] [TimeFormat]  8 >
    <U4 [1] [MaxTerminalMsgLength]  9 >
    <U4 [1] [EstablishCommunicationsTimeout]  49 >
    <U4 [1] [DefaultCommunicationState]  12 >
    <U4 [1] [DefaultControlState]  15 >
    <U4 [1] [DefaultOnlineSubState]  16 >
    <U4 [1] [DefaultOfflineSubState]  17 >
    <U4 [1] [EnableSpooling]  40 >
    <U4 [1] [OverWriteSpool]  42 >
    <U4 [1] [MaxSpoolMessages]  43 >
    <U4 [1] [MaxSpoolTransmit]  44 >
    <U4 [1] [MDLN]  1 >
    <U4 [1] [SOFTREV]  2 >
>
.

 
2023-02-15 18:35:43,106: S2F14 System Bytes=18
<L [14]
    <BOOLEAN [1] [EnableAlarmReportSend]  T >
    <U1 [1] [TimeFormat]  2 >
    <U4 [1] [MaxTerminalMsgLength]  80 >
    <I2 [1] [EstablishCommunicationsTimeout]  30 >
    <U1 [1] [DefaultCommunicationState]  1 >
    <U1 [1] [DefaultControlState]  5 >
    <U1 [1] [DefaultOnlineSubState]  5 >
    <U1 [1] [DefaultOfflineSubState]  2 >
    <BOOLEAN [1] [EnableSpooling]  T >
    <BOOLEAN [1] [OverWriteSpool]  T >
    <U4 [1] [MaxSpoolMessages]  100000 >
    <U4 [1] [MaxSpoolTransmit]  0 >
    <A [6] [MDLN]  'EQPTST' >
    <A [6] [SOFTREV]  'V1.0.0' >
>
.

 
2023-02-15 18:35:43,635: S2F15 W System Bytes=19
<L [2]
    <L [2]
        <U4 [1] [DefaultControlState]  15 >
        <U1 [1] [ECV]  5 >
    >
    <L [2]
        <U4 [1] [DefaultOnlineSubState]  16 >
        <U1 [1] [ECV]  5 >
    >
>
.

 
2023-02-15 18:35:43,725: S2F16 System Bytes=19
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:44,233: S1F15 W System Bytes=20

 
2023-02-15 18:35:44,322: S1F16 System Bytes=20
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:44,326: S6F11 W System Bytes=145
<L [3]
    <U4 [1] []  838 >
    <U4 [1] []  1 >
    <L [1]
        <L [2]
            <U4 [1] []  1 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:32:00.543Z' >
                <U1 [1] [CurrentControlState]  3 >
                <U1 [1] [PreviousControlState]  4 >
            >
        >
    >
>
.

 
2023-02-15 18:35:44,327: S6F12 W System Bytes=145
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:44,835: S1F17 W System Bytes=21

 
2023-02-15 18:35:44,928: S6F11 W System Bytes=146
<L [3]
    <U4 [1] []  839 >
    <U4 [1] []  3 >
    <L [1]
        <L [2]
            <U4 [1] []  3 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:32:01.154Z' >
                <U1 [1] [CurrentControlState]  5 >
                <U1 [1] [PreviousControlState]  3 >
            >
        >
    >
>
.

 
2023-02-15 18:35:44,946: S1F18 System Bytes=21
<B [1] [] '' 00  >
.

 
2023-02-15 18:35:44,946: S6F12 W System Bytes=146
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:35:45,450: S1F3 W System Bytes=22
<L [10]
    <U4 [1] [Clock]  3 >
    <U4 [1] [CommunicationState]  11 >
    <U4 [1] [CurrentControlState]  13 >
    <U4 [1] [PreviousControlState]  14 >
    <U4 [1] [CurrentEquipmentState]  21010 >
    <U4 [1] [PreviousEquipmentState]  21011 >
    <U4 [1] [PPExecName]  72 >
    <U4 [1] [SpoolingState]  41 >
    <U4 [1] [SpoolCountActual]  45 >
    <U4 [1] [SpoolCountTotal]  46 >
>
.

 
2023-02-15 18:35:45,547: S1F4 System Bytes=22
<L [10]
    <A [24] [eventTimestamp]  '2023-02-15T10:32:01.762Z' >
    <U1 [1] [CommunicationState]  1 >
    <U1 [1] [ControlState]  5 >
    <U1 [1] [PreviousControlState]  3 >
    <I2 [1] [CurrentEquipmentState]  2000 >
    <I2 [1] [PreviousEquipmentState]  1000 >
    <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
    <U1 [1] [SpoolingState]  0 >
    <U4 [1] [SpoolCountActual]  0 >
    <U4 [1] [SpoolCountTotal]  0 >
>
.

 
2023-02-15 18:35:46,057: S2F23 W System Bytes=23
<L [5]
    <U4 [1] [TRID]  1 >
    <A [6] [DSPER_hhmmss]  '000010' >
    <U4 [1] [TOTSMP]  0 >
    <U4 [1] [REPGSZ]  1 >
    <L [0]
    >
>
.

 
2023-02-15 18:35:46,151: S2F24 System Bytes=23
<B [1] [] '' 00  >
.

 
2023-02-15 18:36:41,121: S6F11 W System Bytes=150
<L [3]
    <U4 [1] []  841 >
    <U4 [1] []  2 >
    <L [1]
        <L [2]
            <U4 [1] []  2 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:32:57.350Z' >
                <U1 [1] [CurrentControlState]  4 >
                <U1 [1] [PreviousControlState]  5 >
            >
        >
    >
>
.

 
2023-02-15 18:36:41,124: S6F12 W System Bytes=150
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:36:42,831: S6F11 W System Bytes=151
<L [3]
    <U4 [1] []  842 >
    <U4 [1] []  3 >
    <L [1]
        <L [2]
            <U4 [1] []  3 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:32:58.923Z' >
                <U1 [1] [CurrentControlState]  5 >
                <U1 [1] [PreviousControlState]  4 >
            >
        >
    >
>
.

 
2023-02-15 18:36:42,833: S6F12 W System Bytes=151
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:36:57,693: S6F11 W System Bytes=153
<L [3]
    <U4 [1] []  844 >
    <U4 [1] []  300011 >
    <L [1]
        <L [2]
            <U4 [1] []  200011 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:33:13.943Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <BOOLEAN [1] [MaterialStatus]  F >
            >
        >
    >
>
.

 
2023-02-15 18:36:57,695: S6F12 W System Bytes=153
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:09,115: S6F11 W System Bytes=158
<L [3]
    <U4 [1] []  848 >
    <U4 [1] []  300012 >
    <L [1]
        <L [2]
            <U4 [1] []  200012 >
            <L [12]
                <A [24] [Clock]  '2023-02-15T10:33:25.286Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <BOOLEAN [1] [MaterialStatus]  F >
                <U4 [1] [Target A]  0 >
                <U4 [1] [Target B]  0 >
                <U4 [1] [Target C]  0 >
                <U4 [1] [Target D]  0 >
                <U4 [1] [Reroute A]  0 >
                <U4 [1] [Reroute B]  0 >
                <U4 [1] [Reroute C]  0 >
                <U4 [1] [Reroute D]  0 >
            >
        >
    >
>
.

 
2023-02-15 18:37:09,118: S6F12 W System Bytes=158
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:10,911: S6F11 W System Bytes=159
<L [3]
    <U4 [1] []  849 >
    <U4 [1] []  300022 >
    <L [1]
        <L [2]
            <U4 [1] []  200022 >
            <L [16]
                <A [24] [Clock]  '2023-02-15T10:33:26.958Z' >
                <A [4] [SubstrateID]  'None' >
                <BOOLEAN [1] [ProcessResult]  F >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
                <U1 [1] [ProcessDurationSBS]  15 >
                <U1 [1] [ProcessDurationEDS]  30 >
                <I2 [1] [ProcessRecipeId]  11 >
                <A [27] [ProcessRecipeName]  'CTF_LEDE_ED-10mm_MLD-8_12_8' >
                <A [2] [ProcessRecipeVersion]  '22' >
                <A [27] [ProcessRecipeCreationDate]  '2023-02-02T19:04:30.0000000' >
                <A [27] [ProcessRecipeLastModificationDate]  '0001-01-01T00:00:00.0000000' >
                <A [4] [ProcessRecipeCreatedBy]  '4Jet' >
                <A [4] [ProcessRecipeLastModifiedBy]  '4Jet' >
                <F4 [1] [MeasuredSubstrateWidth]  0 >
                <F4 [1] [MeasuredSubstrateLength]  1600 >
            >
        >
    >
>
.

 
2023-02-15 18:37:10,932: S6F12 W System Bytes=159
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:12,450: S6F11 W System Bytes=160
<L [3]
    <U4 [1] []  850 >
    <U4 [1] []  300021 >
    <L [1]
        <L [2]
            <U4 [1] []  200021 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:33:28.524Z' >
                <A [4] [SubstrateID]  'None' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
            >
        >
    >
>
.

 
2023-02-15 18:37:12,450: S6F12 W System Bytes=160
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:13,920: S6F11 W System Bytes=161
<L [3]
    <U4 [1] []  851 >
    <U4 [1] []  300011 >
    <L [1]
        <L [2]
            <U4 [1] []  200011 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:33:30.168Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <BOOLEAN [1] [MaterialStatus]  F >
            >
        >
    >
>
.

 
2023-02-15 18:37:13,921: S6F12 W System Bytes=161
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:15,561: S6F11 W System Bytes=162
<L [3]
    <U4 [1] []  852 >
    <U4 [1] []  2 >
    <L [1]
        <L [2]
            <U4 [1] []  2 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:33:31.811Z' >
                <U1 [1] [CurrentControlState]  4 >
                <U1 [1] [PreviousControlState]  5 >
            >
        >
    >
>
.

 
2023-02-15 18:37:15,562: S6F12 W System Bytes=162
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:37:19,298: S6F11 W System Bytes=163
<L [3]
    <U4 [1] []  853 >
    <U4 [1] []  3 >
    <L [1]
        <L [2]
            <U4 [1] []  3 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:33:35.546Z' >
                <U1 [1] [CurrentControlState]  5 >
                <U1 [1] [PreviousControlState]  4 >
            >
        >
    >
>
.

 
2023-02-15 18:37:19,299: S6F12 W System Bytes=163
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:38:34,367: S6F11 W System Bytes=166
<L [3]
    <U4 [1] []  854 >
    <U4 [1] []  300011 >
    <L [1]
        <L [2]
            <U4 [1] []  200011 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:34:50.509Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <BOOLEAN [1] [MaterialStatus]  F >
            >
        >
    >
>
.

 
2023-02-15 18:38:34,369: S6F12 W System Bytes=166
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:38:35,745: S6F11 W System Bytes=167
<L [3]
    <U4 [1] []  855 >
    <U4 [1] []  300021 >
    <L [1]
        <L [2]
            <U4 [1] []  200021 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:34:51.885Z' >
                <A [4] [SubstrateID]  'None' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
            >
        >
    >
>
.

 
2023-02-15 18:38:35,747: S6F12 W System Bytes=167
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:38:37,308: S6F11 W System Bytes=168
<L [3]
    <U4 [1] []  856 >
    <U4 [1] []  300022 >
    <L [1]
        <L [2]
            <U4 [1] []  200022 >
            <L [16]
                <A [24] [Clock]  '2023-02-15T10:34:53.562Z' >
                <A [4] [SubstrateID]  'None' >
                <BOOLEAN [1] [ProcessResult]  F >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
                <U1 [1] [ProcessDurationSBS]  15 >
                <U1 [1] [ProcessDurationEDS]  30 >
                <I2 [1] [ProcessRecipeId]  11 >
                <A [27] [ProcessRecipeName]  'CTF_LEDE_ED-10mm_MLD-8_12_8' >
                <A [2] [ProcessRecipeVersion]  '22' >
                <A [27] [ProcessRecipeCreationDate]  '2023-02-02T19:04:30.0000000' >
                <A [27] [ProcessRecipeLastModificationDate]  '0001-01-01T00:00:00.0000000' >
                <A [4] [ProcessRecipeCreatedBy]  '4Jet' >
                <A [4] [ProcessRecipeLastModifiedBy]  '4Jet' >
                <F4 [1] [MeasuredSubstrateWidth]  0 >
                <F4 [1] [MeasuredSubstrateLength]  1600 >
            >
        >
    >
>
.

 
2023-02-15 18:38:37,311: S6F12 W System Bytes=168
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:38:38,982: S6F11 W System Bytes=170
<L [3]
    <U4 [1] []  857 >
    <U4 [1] []  300012 >
    <L [1]
        <L [2]
            <U4 [1] []  200012 >
            <L [12]
                <A [24] [Clock]  '2023-02-15T10:34:55.065Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <BOOLEAN [1] [MaterialStatus]  F >
                <U4 [1] [Target A]  0 >
                <U4 [1] [Target B]  0 >
                <U4 [1] [Target C]  0 >
                <U4 [1] [Target D]  0 >
                <U4 [1] [Reroute A]  0 >
                <U4 [1] [Reroute B]  0 >
                <U4 [1] [Reroute C]  0 >
                <U4 [1] [Reroute D]  0 >
            >
        >
    >
>
.

 
2023-02-15 18:38:38,984: S6F12 W System Bytes=170
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:36,077: S6F11 W System Bytes=181
<L [3]
    <U4 [1] []  861 >
    <U4 [1] []  300011 >
    <L [1]
        <L [2]
            <U4 [1] []  200011 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:38:52.282Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <BOOLEAN [1] [MaterialStatus]  F >
            >
        >
    >
>
.

 
2023-02-15 18:42:36,079: S6F12 W System Bytes=181
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:37,513: S6F11 W System Bytes=182
<L [3]
    <U4 [1] []  862 >
    <U4 [1] []  300021 >
    <L [1]
        <L [2]
            <U4 [1] []  200021 >
            <L [5]
                <A [24] [Clock]  '2023-02-15T10:38:53.764Z' >
                <A [4] [SubstrateID]  'None' >
                <A [23] [PPExecName]  'ProcessRecipe_11.recipe' >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
            >
        >
    >
>
.

 
2023-02-15 18:42:37,515: S6F12 W System Bytes=182
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:38,914: S6F11 W System Bytes=183
<L [3]
    <U4 [1] []  863 >
    <U4 [1] []  300022 >
    <L [1]
        <L [2]
            <U4 [1] []  200022 >
            <L [16]
                <A [24] [Clock]  '2023-02-15T10:38:55.119Z' >
                <A [4] [SubstrateID]  'None' >
                <BOOLEAN [1] [ProcessResult]  F >
                <I2 [1] [CurrentEquipmentState]  2000 >
                <I2 [1] [PreviousEquipmentState]  1000 >
                <U1 [1] [ProcessDurationSBS]  15 >
                <U1 [1] [ProcessDurationEDS]  30 >
                <I2 [1] [ProcessRecipeId]  11 >
                <A [27] [ProcessRecipeName]  'CTF_LEDE_ED-10mm_MLD-8_12_8' >
                <A [2] [ProcessRecipeVersion]  '22' >
                <A [27] [ProcessRecipeCreationDate]  '2023-02-02T19:04:30.0000000' >
                <A [27] [ProcessRecipeLastModificationDate]  '0001-01-01T00:00:00.0000000' >
                <A [4] [ProcessRecipeCreatedBy]  '4Jet' >
                <A [4] [ProcessRecipeLastModifiedBy]  '4Jet' >
                <F4 [1] [MeasuredSubstrateWidth]  0 >
                <F4 [1] [MeasuredSubstrateLength]  1600 >
            >
        >
    >
>
.

 
2023-02-15 18:42:38,979: S6F12 W System Bytes=183
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:40,072: S6F11 W System Bytes=184
<L [3]
    <U4 [1] []  864 >
    <U4 [1] []  300012 >
    <L [1]
        <L [2]
            <U4 [1] []  200012 >
            <L [12]
                <A [24] [Clock]  '2023-02-15T10:38:56.321Z' >
                <A [4] [SubstrateID]  'None' >
                <A [4] [LocationID]  'LEDE' >
                <BOOLEAN [1] [MaterialStatus]  F >
                <U4 [1] [Target A]  0 >
                <U4 [1] [Target B]  0 >
                <U4 [1] [Target C]  0 >
                <U4 [1] [Target D]  0 >
                <U4 [1] [Reroute A]  0 >
                <U4 [1] [Reroute B]  0 >
                <U4 [1] [Reroute C]  0 >
                <U4 [1] [Reroute D]  0 >
            >
        >
    >
>
.

 
2023-02-15 18:42:40,074: S6F12 W System Bytes=184
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:43,886: S6F11 W System Bytes=188
<L [3]
    <U4 [1] []  868 >
    <U4 [1] []  2 >
    <L [1]
        <L [2]
            <U4 [1] []  2 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:39:00.125Z' >
                <U1 [1] [CurrentControlState]  4 >
                <U1 [1] [PreviousControlState]  5 >
            >
        >
    >
>
.

 
2023-02-15 18:42:43,887: S6F12 W System Bytes=188
<B [1] [ACKC6] '' 00  >
.

 
2023-02-15 18:42:44,753: S6F11 W System Bytes=189
<L [3]
    <U4 [1] []  869 >
    <U4 [1] []  3 >
    <L [1]
        <L [2]
            <U4 [1] []  3 >
            <L [3]
                <A [24] [Clock]  '2023-02-15T10:39:00.998Z' >
                <U1 [1] [CurrentControlState]  5 >
                <U1 [1] [PreviousControlState]  4 >
            >
        >
    >
>
.

 
2023-02-15 18:42:44,754: S6F12 W System Bytes=189
<B [1] [ACKC6] '' 00  >
.